Satoru Oishi

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Image generating apparatus, image generating method, and storage me...
- Patent number 10,420,461
- Issue date Sep 24, 2019
- Canon Kabushiki Kaisha
- Satoru Oishi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Lithography apparatus, and method of manufacturing article
- Patent number 9,606,460
- Issue date Mar 28, 2017
- Canon Kabushiki Kaisha
- Yuichi Iwasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Drawing apparatus, data processing method, and method of manufactur...
- Patent number 9,001,387
- Issue date Apr 7, 2015
- Canon Kabushiki Kaisha
- Masato Muraki
- G11 - INFORMATION STORAGE
Information Patent Grant
Method of measuring mark position and measuring apparatus
- Patent number 8,976,337
- Issue date Mar 10, 2015
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method
- Patent number 8,532,366
- Issue date Sep 10, 2013
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method, exposure method, pattern forming method, and expo...
- Patent number 8,097,473
- Issue date Jan 17, 2012
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, position detection method, exposure a...
- Patent number 8,089,612
- Issue date Jan 3, 2012
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Position detecting method
- Patent number 7,983,472
- Issue date Jul 19, 2011
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface shape measurement apparatus and exposure apparatus
- Patent number 7,952,725
- Issue date May 31, 2011
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for specifying correlation, exposure apparatus...
- Patent number 7,916,271
- Issue date Mar 29, 2011
- Canon Kabushiki Kaisha
- Hideki Ina
- G01 - MEASURING TESTING
Information Patent Grant
Position detecting method and apparatus
- Patent number 7,865,328
- Issue date Jan 4, 2011
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and device manufacturing method
- Patent number 7,710,543
- Issue date May 4, 2010
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Transfer characteristic calculation apparatus, transfer characteris...
- Patent number 7,443,493
- Issue date Oct 28, 2008
- Canon Kabushiki Kaisha
- Satoru Oishi
- G01 - MEASURING TESTING
Information Patent Grant
Management system, apparatus, and method, exposure apparatus, and c...
- Patent number 7,385,700
- Issue date Jun 10, 2008
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management system and apparatus, method therefor, and device manufa...
- Patent number 7,373,213
- Issue date May 13, 2008
- Canon Kabushiki Kaisha
- Satoru Oishi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Position detecting method
- Patent number 7,352,891
- Issue date Apr 1, 2008
- Canon Kabushiki Kaisha
- Takehiko Suzuki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Surface position measuring method, exposure apparatus, and device m...
- Patent number 7,313,873
- Issue date Jan 1, 2008
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection method and apparatus
- Patent number 7,247,868
- Issue date Jul 24, 2007
- Canon Kabushiki Kaisha
- Takehiko Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus, exposure apparatus using the same, and method...
- Patent number 7,173,716
- Issue date Feb 6, 2007
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method and apparatus, exposure apparatus and dev...
- Patent number 7,148,973
- Issue date Dec 12, 2006
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus, exposure apparatus using same, and method of m...
- Patent number 7,110,116
- Issue date Sep 19, 2006
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus control system, apparatus control method, semiconductor e...
- Patent number 7,075,618
- Issue date Jul 11, 2006
- Canon Kabushiki Kaisha
- Hideki Ina
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection method and apparatus
- Patent number 7,067,826
- Issue date Jun 27, 2006
- Canon Kabushiki Kaisha
- Takehiko Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management system, management apparatus, management method, and dev...
- Patent number 7,069,104
- Issue date Jun 27, 2006
- Canon Kabushiki Kaisha
- Takehiko Suzuki
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Position detecting method and apparatus
- Patent number 7,035,759
- Issue date Apr 25, 2006
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management system, management method and apparatus, and management...
- Patent number 7,010,380
- Issue date Mar 7, 2006
- Canon Kabushiki Kaisha
- Koichi Sentoku
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Position detecting method and apparatus, exposure apparatus and dev...
- Patent number 6,992,780
- Issue date Jan 31, 2006
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management system, apparatus, and method, exposure apparatus, and c...
- Patent number 6,992,767
- Issue date Jan 31, 2006
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for optimizing parameter value in exposure appara...
- Patent number 6,914,666
- Issue date Jul 5, 2005
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management system and apparatus, method therefor, and device manufa...
- Patent number 6,785,583
- Issue date Aug 31, 2004
- Canon Kabushiki Kaisha
- Satoru Oishi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
IMAGE GENERATING APPARATUS, IMAGE GENERATING METHOD, AND STORAGE ME...
- Publication number 20160317016
- Publication date Nov 3, 2016
- Canon Kabushiki Kaisha
- Satoru Oishi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20160139510
- Publication date May 19, 2016
- Canon Kabushiki Kaisha
- Yuichi Iwasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURIN...
- Publication number 20160124322
- Publication date May 5, 2016
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150364291
- Publication date Dec 17, 2015
- Canon Kabushiki Kaisha
- Shigeki Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING AN AR...
- Publication number 20150325404
- Publication date Nov 12, 2015
- Canon Kabushiki Kaisha
- Yusuke Sugiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MEASURING INCLINATION OF BEAM, DRAWING METHOD, DRAWING A...
- Publication number 20150155137
- Publication date Jun 4, 2015
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Application
DRAWING DATA CREATING METHOD, DRAWING APPARATUS, DRAWING METHOD, AN...
- Publication number 20150144807
- Publication date May 28, 2015
- Canon Kabushiki Kaisha
- Satoru Oishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD, PROCESSING APPARATUS, LITHOGRAPHY APPARATUS, AND...
- Publication number 20150011026
- Publication date Jan 8, 2015
- Canon Kabushiki Kaisha
- Satoru OISHI
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD FOR MANUFACTU...
- Publication number 20140320836
- Publication date Oct 30, 2014
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD OF MANUFACTUR...
- Publication number 20140209818
- Publication date Jul 31, 2014
- Canon Kabushiki Kaisha
- Satoru OISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRAWING APPARATUS, DATA PROCESSING METHOD, AND METHOD OF MANUFACTUR...
- Publication number 20130335503
- Publication date Dec 19, 2013
- Masato Muraki
- G11 - INFORMATION STORAGE
Information Patent Application
DRAWING APPARATUS, REFERENCE MEMBER, AND METHOD OF MANUFACTURING AR...
- Publication number 20130230805
- Publication date Sep 5, 2013
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- B82 - NANO-TECHNOLOGY
Information Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130216954
- Publication date Aug 22, 2013
- Canon Kabushiki Kaisha
- Satoru Oishi
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF MEASURING MARK POSITION AND MEASURING APPARATUS
- Publication number 20120050710
- Publication date Mar 1, 2012
- Canon Kabushiki Kaisha
- Satoru OISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTING METHOD
- Publication number 20110242509
- Publication date Oct 6, 2011
- Canon Kabushiki Kaisha
- Satoru OISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE SHAPE MEASUREMENT APPARATUS AND EXPOSURE APPARATUS
- Publication number 20090286172
- Publication date Nov 19, 2009
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Application
POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, EXPOSURE A...
- Publication number 20090244513
- Publication date Oct 1, 2009
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
DETECTING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING M...
- Publication number 20090220872
- Publication date Sep 3, 2009
- Canon Kabushiki Kaisha
- Satoru OISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT METHOD, EXPOSURE METHOD, PATTERN FORMING METHOD, AND EXPO...
- Publication number 20090138135
- Publication date May 28, 2009
- Canon Kabushiki Kaisha
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTING METHOD AND APPARATUS
- Publication number 20080013091
- Publication date Jan 17, 2008
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCANNING EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20070291246
- Publication date Dec 20, 2007
- Canon Kabushiki Kaisha
- Satoru OISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TRANSFER CHARACTERISTIC CALCULATION APPARATUS, TRANSFER CHARACTERIS...
- Publication number 20070237253
- Publication date Oct 11, 2007
- Canon Kabushiki Kaisha
- Satoru Oishi
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for specifying correlation, exposure apparatus...
- Publication number 20070019857
- Publication date Jan 25, 2007
- Hideki Ina
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Surface position measuring method, exposure apparatus, and device m...
- Publication number 20070017110
- Publication date Jan 25, 2007
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Management system, management apparatus, management method, and dev...
- Publication number 20060195215
- Publication date Aug 31, 2006
- Canon Kabushiki Kaisha
- Takehiko Suzuki
- G05 - CONTROLLING REGULATING
Information Patent Application
Position detecting method and apparatus
- Publication number 20060106566
- Publication date May 18, 2006
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detecting method
- Publication number 20060092420
- Publication date May 4, 2006
- Satoru Oishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Management system, apparatus, and method, exposure apparatus, and c...
- Publication number 20060050274
- Publication date Mar 9, 2006
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detection method and apparatus
- Publication number 20050264781
- Publication date Dec 1, 2005
- Canon Kabushiki Kaisha
- Takehiko Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position detecting method and apparatus, exposure apparatus and dev...
- Publication number 20050243296
- Publication date Nov 3, 2005
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Satoru Oishi

Person

Patents Grantslast 30 patents

Image generating apparatus, image generating method, and storage me...

Lithography apparatus, and method of manufacturing article

Drawing apparatus, data processing method, and method of manufactur...

Method of measuring mark position and measuring apparatus

Position detecting method

Alignment method, exposure method, pattern forming method, and expo...

Position detection apparatus, position detection method, exposure a...

Position detecting method

Surface shape measurement apparatus and exposure apparatus

Apparatus and method for specifying correlation, exposure apparatus...

Position detecting method and apparatus

Scanning exposure apparatus and device manufacturing method

Transfer characteristic calculation apparatus, transfer characteris...

Management system, apparatus, and method, exposure apparatus, and c...

Management system and apparatus, method therefor, and device manufa...

Position detecting method

Surface position measuring method, exposure apparatus, and device m...

Position detection method and apparatus

Alignment apparatus, exposure apparatus using the same, and method...

Position detecting method and apparatus, exposure apparatus and dev...

Alignment apparatus, exposure apparatus using same, and method of m...

Apparatus control system, apparatus control method, semiconductor e...

Position detection method and apparatus

Management system, management apparatus, management method, and dev...

Position detecting method and apparatus

Management system, management method and apparatus, and management...

Position detecting method and apparatus, exposure apparatus and dev...

Management system, apparatus, and method, exposure apparatus, and c...

Method and system for optimizing parameter value in exposure appara...

Management system and apparatus, method therefor, and device manufa...

Patents Applicationslast 30 patents

IMAGE GENERATING APPARATUS, IMAGE GENERATING METHOD, AND STORAGE ME...

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURIN...

LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING AN AR...

METHOD FOR MEASURING INCLINATION OF BEAM, DRAWING METHOD, DRAWING A...

DRAWING DATA CREATING METHOD, DRAWING APPARATUS, DRAWING METHOD, AN...

PROCESSING METHOD, PROCESSING APPARATUS, LITHOGRAPHY APPARATUS, AND...

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD FOR MANUFACTU...

LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD OF MANUFACTUR...

DRAWING APPARATUS, DATA PROCESSING METHOD, AND METHOD OF MANUFACTUR...

DRAWING APPARATUS, REFERENCE MEMBER, AND METHOD OF MANUFACTURING AR...

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

METHOD OF MEASURING MARK POSITION AND MEASURING APPARATUS

POSITION DETECTING METHOD

SURFACE SHAPE MEASUREMENT APPARATUS AND EXPOSURE APPARATUS

POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, EXPOSURE A...

DETECTING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING M...

ALIGNMENT METHOD, EXPOSURE METHOD, PATTERN FORMING METHOD, AND EXPO...

POSITION DETECTING METHOD AND APPARATUS

SCANNING EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

TRANSFER CHARACTERISTIC CALCULATION APPARATUS, TRANSFER CHARACTERIS...

Apparatus and method for specifying correlation, exposure apparatus...

Surface position measuring method, exposure apparatus, and device m...

Management system, management apparatus, management method, and dev...

Position detecting method and apparatus

Position detecting method

Management system, apparatus, and method, exposure apparatus, and c...

Position detection method and apparatus

Position detecting method and apparatus, exposure apparatus and dev...