Satoru Sagoh

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Kasugai, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam exposure mask and method of manufacturing the same an...
- Patent number 6,090,527
- Issue date Jul 18, 2000
- Fujitsu Limited
- Satoru Yamazaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mask and method of creating mask as well as electron-beam exposure...
- Patent number 5,952,155
- Issue date Sep 14, 1999
- Fujitsu Limited
- Takayuki Sakakibara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam exposure mask and method of manufacturing the same an...
- Patent number 5,849,437
- Issue date Dec 15, 1998
- Fujitsu Limited
- Satoru Yamazaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mask and method of creating mask as well as electron-beam exposure...
- Patent number 5,824,437
- Issue date Oct 20, 1998
- Fujitsu Limited
- Takayuki Sakakibara
- B82 - NANO-TECHNOLOGY