Satoru Sagou

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged-particle-beam exposure device and charged-particle-beam exp...
- Patent number 6,222,195
- Issue date Apr 24, 2001
- Fujitsu Limited
- Akio Yamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle-beam exposure device and charged-particle-beam exp...
- Patent number 6,137,111
- Issue date Oct 24, 2000
- Fujitsu Limited
- Akio Yamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of detecting a deficiency in a charged-particle-beam exposur...
- Patent number 5,830,612
- Issue date Nov 3, 1998
- Fujitsu Limited
- Akio Yamada
- B82 - NANO-TECHNOLOGY