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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate cleaning apparatus, substrate cleaning system, substrate...
Patent number
10,998,183
Issue date
May 4, 2021
Tokyo Electron Limited
Miyako Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming system, film forming method, and computer storage medium
Patent number
10,964,606
Issue date
Mar 30, 2021
Tokyo Electron Limited
Satoru Shimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure apparatus, resist pattern forming method, and storage medium
Patent number
10,101,669
Issue date
Oct 16, 2018
Tokyo Electron Limited
Seiji Nagahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment system
Patent number
10,025,190
Issue date
Jul 17, 2018
Tokyo Electron Limited
Seiji Nagahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Film forming method, computer storage medium, and film forming system
Patent number
9,741,559
Issue date
Aug 22, 2017
Tokyo Electron Limited
Satoru Shimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment method, non-transitory computer storage medium...
Patent number
9,341,952
Issue date
May 17, 2016
Tokyo Electron Limited
Fumiko Iwao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Film forming method, non-transitory computer storage medium and fil...
Patent number
9,329,483
Issue date
May 3, 2016
Tokyo Electron Limited
Fumiko Iwao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment method, non-transitory computer storage medium...
Patent number
9,280,052
Issue date
Mar 8, 2016
Tokyo Electron Limited
Fumiko Iwao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating treatment method and coating treatment apparatus
Patent number
8,791,030
Issue date
Jul 29, 2014
Tokyo Electron Limited
Fumiko Iwao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern forming method, semiconductor device manufacturing method a...
Patent number
8,283,253
Issue date
Oct 9, 2012
Tokyo Electron Limited
Hidetami Yaegashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern forming method, semiconductor device manufacturing method a...
Patent number
8,273,661
Issue date
Sep 25, 2012
Tokyo Electron Limited
Hidetami Yaegashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device, and resist coating an...
Patent number
8,202,682
Issue date
Jun 19, 2012
Tokyo Electron Limited
Fumiko Iwao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for manufacturing a semiconductor device
Patent number
8,075,730
Issue date
Dec 13, 2011
Tokyo Electron Limited
Satoru Shimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning device and substrate cleaning method
Patent number
8,037,890
Issue date
Oct 18, 2011
Tokyo Electron Limited
Taro Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment method for etching a base film using a resist p...
Patent number
7,781,342
Issue date
Aug 24, 2010
Tokyo Electron Limited
Mitsuaki Iwashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming wiring of semiconductor device
Patent number
7,485,568
Issue date
Feb 3, 2009
Tokyo Electron Limited
Satoru Shimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,401,988
Issue date
Jul 22, 2008
Tokyo Electron Limited
Takayuki Katano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,208,066
Issue date
Apr 24, 2007
Tokyo Electron Limited
Junichi Kitano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
6,485,203
Issue date
Nov 26, 2002
Tokyo Electron Limited
Takayuki Katano
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...
Publication number
20240120217
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Shinichiro KAWAKAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM
Publication number
20240036473
Publication date
Feb 1, 2024
TOKYO ELECTRON LIMITED
Seiji FUJIMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM
Publication number
20210318618
Publication date
Oct 14, 2021
Tokyo Electron Limited
Satoru SHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING SYSTEM, FILM FORMING METHOD, AND COMPUTER STORAGE MEDIUM
Publication number
20190355573
Publication date
Nov 21, 2019
TOKYO ELECTRON LIMITED
Satoru SHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM
Publication number
20170031245
Publication date
Feb 2, 2017
TOKYO ELECTRON LIMITED
Seiji NAGAHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE APPARATUS, RESIST PATTERN FORMING METHOD, AND STORAGE MEDIUM
Publication number
20160327869
Publication date
Nov 10, 2016
TOKYO ELECTRON LIMITED
Seiji NAGAHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING SYSTEM, SUBSTRATE...
Publication number
20160163534
Publication date
Jun 9, 2016
TOKYO ELECTRON LIMITED
Miyako KANEKO
B08 - CLEANING
Information
Patent Application
FILM FORMING METHOD, COMPUTER STORAGE MEDIUM, AND FILM FORMING SYSTEM
Publication number
20150357188
Publication date
Dec 10, 2015
TOKYO ELECTRON LIMITED
Satoru SHIMURA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE TREATMENT METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM...
Publication number
20140255852
Publication date
Sep 11, 2014
TOKYO ELECTRON LIMITED
Fumiko IWAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM...
Publication number
20140255844
Publication date
Sep 11, 2014
TOKYO ELECTRON LIMITED
Fumiko IWAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FILM FORMING METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM AND FIL...
Publication number
20140170332
Publication date
Jun 19, 2014
TOKYO ELECTRON LIMITED
Fumiko IWAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING SYSTEM, SUBSTRATE...
Publication number
20140041685
Publication date
Feb 13, 2014
TOKYO ELECTRON LIMITED
Miyako KANEKO
B08 - CLEANING
Information
Patent Application
COATING TREATMENT METHOD AND COATING TREATMENT APPARATUS
Publication number
20140038423
Publication date
Feb 6, 2014
TOKYO ELECTRON LIMITED
Fumiko IWAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS
Publication number
20120312472
Publication date
Dec 13, 2012
TOKYO ELECTRON LIMITED
Hidetami Yaegashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS
Publication number
20120305183
Publication date
Dec 6, 2012
TOKYO ELECTRON LIMITED
Hidetami Yaegashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20120034779
Publication date
Feb 9, 2012
Satoru SHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
Publication number
20120006362
Publication date
Jan 12, 2012
TOKYO ELECTRON LIMITED
Taro Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
Publication number
20100307683
Publication date
Dec 9, 2010
TOKYO ELECTRON LIMITED
Mitsuaki IWASHITA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RESIST COATING AN...
Publication number
20090220892
Publication date
Sep 3, 2009
TOKYO ELECTRON LIMITED
Fumiko IWAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD A...
Publication number
20090208852
Publication date
Aug 20, 2009
TOKYO ELECTRON LIMITED
Satoru Shimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD A...
Publication number
20090209109
Publication date
Aug 20, 2009
TOKYO ELECTRON LIMITED
Hidetami Yaegashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD A...
Publication number
20090209105
Publication date
Aug 20, 2009
TOKYO ELECTRON LIMITED
Hidetami Yaegashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE AND DEVELOPING METHOD
Publication number
20080070167
Publication date
Mar 20, 2008
TOKYO ELECTRON LIMITED
Nobuhiro TAKAHASHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Process For Fabricating Semiconductor Device
Publication number
20080057728
Publication date
Mar 6, 2008
TOKYO ELECTRON LIMITED
Satoru Shimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Treatment Method and Substrate Treatment Apparatus
Publication number
20070243711
Publication date
Oct 18, 2007
TOKYO ELECTRON LIMITED
Mitsuaki Iwashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Peeling-off method and reworking method of resist film
Publication number
20070184379
Publication date
Aug 9, 2007
TOKYO ELECTRON LIMITED
Shigeo Ashigaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20070127916
Publication date
Jun 7, 2007
TOKYO ELECTRON LIMITED
Junichi Kitano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate cleaning device and substrate cleaning method
Publication number
20070044823
Publication date
Mar 1, 2007
TOKYO ELECTRON LIMITED
Taro Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing method
Publication number
20060068337
Publication date
Mar 30, 2006
TOKYO ELECTRON LIMITED
Keiji Tanouchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for forming wiring of semiconductor device
Publication number
20050196953
Publication date
Sep 8, 2005
TOKYO ELECTRON LIMITED
Satoru Shimura
H01 - BASIC ELECTRIC ELEMENTS