Satoru TAKAHATA

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and recording medium for changing at...
- Patent number 11,521,880
- Issue date Dec 6, 2022
- Kokusai Electric Corporation
- Satoru Takahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus, controller and processing system
- Patent number 10,452,856
- Issue date Oct 22, 2019
- Kokusai Electric Corporation
- Ichiro Nunomura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,437,465
- Issue date Sep 6, 2016
- Hitachi Kokusai Electric Inc.
- Satoru Takahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,904,955
- Issue date Dec 9, 2014
- Hitachi Kokusai Electric, Inc.
- Makoto Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, control method of the substrate pro...
- Patent number 8,457,774
- Issue date Jun 4, 2013
- Hitachi Kokusai Electric Inc.
- Yukio Ozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,443,484
- Issue date May 21, 2013
- Hitachi Kokusai Electric Inc.
- Yukio Ozaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230187243
- Publication date Jun 15, 2023
- Kokusai Electric Corporation
- Jin SHIBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
- Publication number 20200035533
- Publication date Jan 30, 2020
- Kokusai Electric Corporation
- Satoru TAKAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS, CONTROLLER AND PROCESSING SYSTEM
- Publication number 20170193243
- Publication date Jul 6, 2017
- Hitachi Kokusai Electric Inc.
- Ichiro NUMOMURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20150371914
- Publication date Dec 24, 2015
- Hitachi Kokusai Electric Inc.
- Yukio OZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND ITS MAINTENANCE METHOD, SUBSTRAT...
- Publication number 20130247937
- Publication date Sep 26, 2013
- Ichiro NUNOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD OF THE SUBSTRATE PRO...
- Publication number 20110082581
- Publication date Apr 7, 2011
- Hitachi Kokusai Electric Inc.
- Yukio OZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20100144145
- Publication date Jun 10, 2010
- Hitachi Kokusai Electric Inc.
- Satoru TAKAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20100055808
- Publication date Mar 4, 2010
- Hitachi Kokusai Electric, Inc.
- Yukio Ozaki
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090229634
- Publication date Sep 17, 2009
- Makoto Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20090044749
- Publication date Feb 19, 2009
- Hitachi Kokusai Electric Inc.
- Yukio Ozaki
- H01 - BASIC ELECTRIC ELEMENTS

Satoru TAKAHATA

Person

Patents Grantslast 30 patents

Substrate processing apparatus and recording medium for changing at...

Processing apparatus, controller and processing system

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus

Substrate processing apparatus, control method of the substrate pro...

Substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM

PROCESSING APPARATUS, CONTROLLER AND PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND ITS MAINTENANCE METHOD, SUBSTRAT...

SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD OF THE SUBSTRATE PRO...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS

Substrate processing apparatus