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Satoru Toyoda

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM-FORMING APPARATUS
    • Publication number 20140048413
    • Publication date Feb 20, 2014
    • ULVAC, Inc.
    • Shuji Kodaira
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING APPARATUS AND METHOD FOR CLEANING FILM-FORMING APPARATUS
    • Publication number 20130239993
    • Publication date Sep 19, 2013
    • ULVAC, Inc.
    • Yohei Ogawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR THE FORMATION OF CO FILM AND METHOD FOR THE FORMATION OF...
    • Publication number 20130023116
    • Publication date Jan 24, 2013
    • Ulvac, Inc.
    • Shoichiro Kumamoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COATING SURFACE PROCESSING METHOD AND COATING SURFACE PROCESSING AP...
    • Publication number 20120121818
    • Publication date May 17, 2012
    • ULVAC, Inc.
    • Shuji Kodaira
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMATION APPARATUS
    • Publication number 20120118732
    • Publication date May 17, 2012
    • ULVAC, Inc.
    • Shuji Kodaira
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING APPARATUS
    • Publication number 20120111722
    • Publication date May 10, 2012
    • ULVAC, Inc.
    • Shuji Kodaira
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION APPARATUS
    • Publication number 20120103801
    • Publication date May 3, 2012
    • ULVAC, Inc.
    • Shuji Kodaira
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION APPARATUS AND FILM FORMING METHOD
    • Publication number 20120097527
    • Publication date Apr 26, 2012
    • ULVAC, Inc.
    • Shuji Kodaira
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for Forming Tantalum Nitride Film
    • Publication number 20100206716
    • Publication date Aug 19, 2010
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR FORMING TANTALUM NITRIDE FILM
    • Publication number 20090246375
    • Publication date Oct 1, 2009
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for Forming Tantalum Nitride Film
    • Publication number 20090159430
    • Publication date Jun 25, 2009
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for Forming Tantalum Nitride Film
    • Publication number 20090162565
    • Publication date Jun 25, 2009
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for Forming Tantalum Nitride Film
    • Publication number 20090159431
    • Publication date Jun 25, 2009
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    • Publication number 20090120787
    • Publication date May 14, 2009
    • ULVAC, Inc.
    • Yoshihiro OKAMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for Forming Tantalum Nitride Film
    • Publication number 20090104775
    • Publication date Apr 23, 2009
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    BIAS SPUTTERING FILM FORMING PROCESS AND BIAS SPUTTERING FILM FORMI...
    • Publication number 20090095617
    • Publication date Apr 16, 2009
    • Ulvac, Inc.
    • Myounggoo Lee
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for Forming Cu Film
    • Publication number 20090078580
    • Publication date Mar 26, 2009
    • ULVAC, Inc.
    • Tomoyuki Yoshihama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method for Forming Tantalum Nitride Film
    • Publication number 20080199601
    • Publication date Aug 21, 2008
    • Narishi Gonohe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Bias sputtering film forming process and bias sputtering film formi...
    • Publication number 20040050687
    • Publication date Mar 18, 2004
    • ULVAC, Inc.
    • Myounggoo Lee
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...