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Satoru Yamashita
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Kofu, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Fluid control system and flow rate measurement method
Patent number
11,460,869
Issue date
Oct 4, 2022
Fujikin Incorporated
Satoru Yamashita
G05 - CONTROLLING REGULATING
Information
Patent Grant
Liquid level meter, vaporizer equipped with the same, and liquid le...
Patent number
11,402,250
Issue date
Aug 2, 2022
Fujikin Incorporated
Atsushi Hidaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of determining flow rate of a gas in a substrate processing...
Patent number
10,876,870
Issue date
Dec 29, 2020
Tokyo Electron Limited
Risako Miyoshi
G01 - MEASURING TESTING
Information
Patent Grant
Vaporization supply apparatus
Patent number
10,646,844
Issue date
May 12, 2020
Fujikin Incorporated
Atsushi Hidaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Liquid level indicator and liquid raw material vaporization feeder
Patent number
10,604,840
Issue date
Mar 31, 2020
Fujikin Incorporated
Atsushi Hidaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Raw material vaporization and supply apparatus
Patent number
9,994,955
Issue date
Jun 12, 2018
FUJIKIN INCORPORATED
Atsushi Hidaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vaporizer
Patent number
8,724,974
Issue date
May 13, 2014
Fujikin Incorporated
Tadahiro Ohmi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Probe card cleaning apparatus, probe apparatus with the cleaning ap...
Patent number
5,778,485
Issue date
Jul 14, 1998
Tokyo Electron Limited
Kunio Sano
B08 - CLEANING
Information
Patent Grant
Method of coating a conductive probe needle
Patent number
5,690,998
Issue date
Nov 25, 1997
Tokyo Electron Kabushiki Kaisha
Yasushi Nagasawa
G01 - MEASURING TESTING
Information
Patent Grant
Probe needle
Patent number
5,532,613
Issue date
Jul 2, 1996
Tokyo Electron Kabushiki Kaisha
Yasushi Nagasawa
G01 - MEASURING TESTING
Information
Patent Grant
Vertical probe tester card with coaxial probes
Patent number
5,525,911
Issue date
Jun 11, 1996
Tokyo Electron Limited
Hiroshi Marumo
G01 - MEASURING TESTING
Information
Patent Grant
Probe and a method of manufacturing the same
Patent number
5,378,971
Issue date
Jan 3, 1995
Tokyo Electron Limited
Satoru Yamashita
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Probe apparatus
Patent number
5,325,052
Issue date
Jun 28, 1994
Tokyo Electron Yamanashi Limited
Satoru Yamashita
G01 - MEASURING TESTING
Information
Patent Grant
Probe with contact portion including Au and Cu alloy
Patent number
5,266,895
Issue date
Nov 30, 1993
Tokyo Electron Yamanashi Limited
Satoru Yamashita
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Fluid Control System and Flow Rate Measurement Method
Publication number
20200159257
Publication date
May 21, 2020
Fujikin Incorporated
Satoru YAMASHITA
G05 - CONTROLLING REGULATING
Information
Patent Application
LIQUID LEVEL METER, VAPORIZER EQUIPPED WITH THE SAME, AND LIQUID LE...
Publication number
20200088561
Publication date
Mar 19, 2020
Fujikin Incorporated
Atsushi HIDAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DETERMINING FLOW RATE OF GAS
Publication number
20190212176
Publication date
Jul 11, 2019
TOKYO ELECTRON LIMITED
Risako MIYOSHI
G01 - MEASURING TESTING
Information
Patent Application
VAPORIZATION SUPPLY APPARATUS
Publication number
20180071702
Publication date
Mar 15, 2018
Fujikin Incorporated
Atsushi HIDAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LIQUID LEVEL INDICATOR AND LIQUID RAW MATERIAL VAPORIZATION FEEDER
Publication number
20170327949
Publication date
Nov 16, 2017
Fujikin Incorporated
Atsushi Hidaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RAW MATERIAL VAPORIZATION AND SUPPLY APPARATUS
Publication number
20150322567
Publication date
Nov 12, 2015
Fujikin Incorporated
Atsushi Hidaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPORIZER
Publication number
20130084059
Publication date
Apr 4, 2013
Tohoku University
Tadahiro Ohmi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...