SATOSHI AKIMOTO

Person

UTSUNOMIYA-SHI, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Control apparatus, lithography apparatus, and method of manufacturi...
- Patent number 9,140,997
- Issue date Sep 22, 2015
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion exposure apparatus, method of controlling the same...
- Patent number 7,692,760
- Issue date Apr 6, 2010
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,495,771
- Issue date Feb 24, 2009
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus including a correction unit to correct a wavelength...
- Patent number 7,292,348
- Issue date Nov 6, 2007
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus and control method including first and second measu...
- Patent number 7,280,225
- Issue date Oct 9, 2007
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and device manufacturing method
- Patent number 7,158,212
- Issue date Jan 2, 2007
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Step and scan projection exposure apparatus, maintenance method the...
- Patent number 6,567,154
- Issue date May 20, 2003
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method of controlling same
- Patent number 6,359,688
- Issue date Mar 19, 2002
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and its control method
- Patent number 6,043,500
- Issue date Mar 28, 2000
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURI...
- Publication number 20130265558
- Publication date Oct 10, 2013
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20080013099
- Publication date Jan 17, 2008
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus
- Publication number 20060082784
- Publication date Apr 20, 2006
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid immersion exposure apparatus, method of controlling the same...
- Publication number 20060028630
- Publication date Feb 9, 2006
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus and control method therefor
- Publication number 20050190375
- Publication date Sep 1, 2005
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure apparatus and device manufacturing method
- Publication number 20050083501
- Publication date Apr 21, 2005
- Canon Kabushiki Kaisha
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD OF CONTROLLING SAME
- Publication number 20020001082
- Publication date Jan 3, 2002
- SATOSHI AKIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Step & scan projection exposure apparatus, maintenance method there...
- Publication number 20020001915
- Publication date Jan 3, 2002
- Satoshi Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

SATOSHI AKIMOTO

Person

Patents Grantslast 30 patents

Control apparatus, lithography apparatus, and method of manufacturi...

Liquid immersion exposure apparatus, method of controlling the same...

Exposure apparatus

Stage apparatus including a correction unit to correct a wavelength...

Stage apparatus and control method including first and second measu...

Scanning exposure apparatus and device manufacturing method

Step and scan projection exposure apparatus, maintenance method the...

Projection exposure apparatus and method of controlling same

Exposure apparatus and its control method

Patents Applicationslast 30 patents

CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURI...

EXPOSURE APPARATUS

Stage apparatus

Liquid immersion exposure apparatus, method of controlling the same...

Stage apparatus and control method therefor

Scanning exposure apparatus and device manufacturing method

PROJECTION EXPOSURE APPARATUS AND METHOD OF CONTROLLING SAME

Step & scan projection exposure apparatus, maintenance method there...