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Tokyo-To, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Vertical thermal processing apparatus and substrate supporter
Patent number
8,940,096
Issue date
Jan 27, 2015
Tokyo Electron Limited
Satoshi Asari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming apparatus
Patent number
8,833,298
Issue date
Sep 16, 2014
Tokyo Electron Limited
Izumi Sato
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Vertical thermal processing apparatus
Patent number
8,672,602
Issue date
Mar 18, 2014
Tokyo Electron Limited
Satoshi Asari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vertical-type heat processing apparatus and method of controlling t...
Patent number
7,905,700
Issue date
Mar 15, 2011
Tokyo Electron Limited
Satoshi Asari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vertical heat treatment system and method of transferring process o...
Patent number
7,677,858
Issue date
Mar 16, 2010
Tokyo Electron Limited
Satoshi Asari
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Vertical heat treatment system and automatic teaching method for tr...
Patent number
7,547,209
Issue date
Jun 16, 2009
Tokyo Electron Limited
Satoshi Asari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vertical type of thermal processing apparatus and method of using t...
Patent number
7,416,405
Issue date
Aug 26, 2008
Tokyo Electron Limited
Satoshi Asari
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20130167772
Publication date
Jul 4, 2013
TOKYO ELECTRON LIMITED
Izumi SATO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
VERTICAL THERMAL PROCESSING APPARATUS AND SUBSTRATE SUPPORTER
Publication number
20100058982
Publication date
Mar 11, 2010
TOKYO ELECTRON LIMITED
Satoshi ASARI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VERTICAL THERMAL PROCESSING APPARATUS
Publication number
20100061828
Publication date
Mar 11, 2010
TOKYO ELECTRON LIMITED
Satoshi ASARI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vertical Heat Treatment System and Automatic Teaching Method for Tr...
Publication number
20070273892
Publication date
Nov 29, 2007
Satoshi Asari
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Vertical-type heat processing apparatus and method of controlling t...
Publication number
20070248439
Publication date
Oct 25, 2007
Satoshi Asari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vertical-type heat processing apparatus and method of controlling t...
Publication number
20070238062
Publication date
Oct 11, 2007
Satoshi Asari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vertical Type of Thermal Processing Apparatus and Method of Using t...
Publication number
20070231763
Publication date
Oct 4, 2007
Satoshi Asari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vertical Heat Treatment System And Method Of Transferring Process O...
Publication number
20070199860
Publication date
Aug 30, 2007
Satoshi Asari
H01 - BASIC ELECTRIC ELEMENTS