Satoshi BIWA

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,057,327
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Masataka Gosho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and control method thereof
- Patent number 11,557,492
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Satoshi Biwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus and cleaning method of substrate processing appa...
- Patent number 11,295,965
- Issue date Apr 5, 2022
- Tokyo Electron Limited
- Kohei Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus having cooling member
- Patent number 10,679,845
- Issue date Jun 9, 2020
- Tokyo Electron Limited
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,619,922
- Issue date Apr 14, 2020
- Tokyo Electron Limited
- Gentaro Goshi
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,593,571
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,381,246
- Issue date Aug 13, 2019
- Tokyo Electron Limited
- Satoshi Okamura
- B08 - CLEANING
Information Patent Grant
Substrate processing system
- Patent number 10,276,425
- Issue date Apr 30, 2019
- Tokyo Electron Limited
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 8,671,875
- Issue date Mar 18, 2014
- Tokyo Electron Limited
- Shuichi Nagamine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240371661
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230187233
- Publication date Jun 15, 2023
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20200388512
- Publication date Dec 10, 2020
- TOKYO ELECTRON LIMITED
- Satoshi BIWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200168482
- Publication date May 28, 2020
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190206702
- Publication date Jul 4, 2019
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS AND CLEANING METHOD OF SUBSTRATE PROCESSING APPA...
- Publication number 20190148182
- Publication date May 16, 2019
- TOKYO ELECTRON LIMITED
- Kohei YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180138060
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Satoshi Okamura
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170287742
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20170256398
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20170254589
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Gentaro Goshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20160148827
- Publication date May 26, 2016
- TOKYO ELECTRON LIMITED
- Terufumi Wakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20100040779
- Publication date Feb 18, 2010
- TOKYO ELECTRON LIMITED
- Shuichi NAGAMINE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Satoshi BIWA

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and control method thereof

Cleaning apparatus and cleaning method of substrate processing appa...

Substrate processing apparatus having cooling member

Substrate processing apparatus, substrate processing method, and st...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing system

Liquid processing apparatus, liquid processing method and storage m...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD THEREOF

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CLEANING APPARATUS AND CLEANING METHOD OF SUBSTRATE PROCESSING APPA...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING SYSTEM

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...