Satoshi Gomi

Person

Yamanashi-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system, substrate processing method, and contr...
- Patent number 11,823,877
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Koichi Miyashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 11,276,592
- Issue date Mar 15, 2022
- Tokyo Electron Limited
- Katsuhito Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing system
- Patent number 9,223,305
- Issue date Dec 29, 2015
- Tokyo Electron Limited
- Gaku Ikeda
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of detecting abnormal placement of substrate, substrate proc...
- Patent number 8,581,153
- Issue date Nov 12, 2013
- Tokyo Electron Limited
- Takashi Chino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...
- Publication number 20210305029
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Koichi MIYASHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20200328100
- Publication date Oct 15, 2020
- TOKYO ELECTRON LIMITED
- Katsuhito HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20160307784
- Publication date Oct 20, 2016
- TOKYO ELECTRON LIMITED
- Satoshi GOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PROCESSING METHOD AND MICROWAVE PROCESSING APPARATUS
- Publication number 20140042153
- Publication date Feb 13, 2014
- TOKYO ELECTRON LIMITED
- Kouji Shimomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20130013240
- Publication date Jan 10, 2013
- TOKYO ELECTON LIMITED
- Gaku Ikeda
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD OF DETECTING ABNORMAL PLACEMENT OF SUBSTRATE, SUBSTRATE PROC...
- Publication number 20110174800
- Publication date Jul 21, 2011
- TOKYO ELECTRON LIMITED
- Takashi Chino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Satoshi Gomi

Person

Patents Grantslast 30 patents

Substrate processing system, substrate processing method, and contr...

Processing apparatus and processing method

Semiconductor manufacturing system

Method of detecting abnormal placement of substrate, substrate proc...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...

PROCESSING APPARATUS AND PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM

MICROWAVE PROCESSING METHOD AND MICROWAVE PROCESSING APPARATUS

SEMICONDUCTOR MANUFACTURING SYSTEM

METHOD OF DETECTING ABNORMAL PLACEMENT OF SUBSTRATE, SUBSTRATE PROC...