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Satoshi Harada
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for evaluating processing apparatus status and...
Patent number
7,689,028
Issue date
Mar 30, 2010
Tokyo Electron Limited
Shinji Sakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for data pre-population
Patent number
7,437,199
Issue date
Oct 14, 2008
Tokyo Electron Limited
James E Willis
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Plasma processing method, detecting method of completion of seasoni...
Patent number
7,313,451
Issue date
Dec 25, 2007
Tokyo Electron Limited
Naoki Takayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for automatic configuration of processing system
Patent number
7,213,478
Issue date
May 8, 2007
Tokyo Electron Limited
Satoshi Harada
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
Information
Patent Application
Plasma processing method, detecting method of completion of seasoni...
Publication number
20050126709
Publication date
Jun 16, 2005
Naoki Takayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for evaluating processing apparatus status and...
Publication number
20050125090
Publication date
Jun 9, 2005
TOKYO ELECTRON LIMITED
Shinji Sakano
G05 - CONTROLLING REGULATING
Information
Patent Application
Method for automatic configuration of processing system
Publication number
20050015176
Publication date
Jan 20, 2005
TOKYO ELECTRON LIMITED
Satoshi Harada
G05 - CONTROLLING REGULATING
Information
Patent Application
Method for data pre-population
Publication number
20040243256
Publication date
Dec 2, 2004
TOKYO ELECTRON LIMITED
James E. Willis
G05 - CONTROLLING REGULATING