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Satoshi Haraichi
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Tsukuba, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Device manufacturing apparatus
Patent number
9,209,054
Issue date
Dec 8, 2015
National Institute of Advanced Industrial Science and Technology
Shiro Hara
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method of making wiring and logic corrections on a semiconductor de...
Patent number
6,753,253
Issue date
Jun 22, 2004
Hitachi, Ltd.
Takahiko Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
IC wiring connecting method using focused energy beams
Patent number
5,824,598
Issue date
Oct 20, 1998
Hitachi, Ltd.
Hiroshi Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing method and apparatus using focused energy beam
Patent number
5,683,547
Issue date
Nov 4, 1997
Hitachi, Ltd.
Junzou Azuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
IC wiring connecting method and apparatus
Patent number
5,497,034
Issue date
Mar 5, 1996
Hitachi, Ltd.
Hiroshi Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
IC wiring connecting method and apparatus
Patent number
5,472,507
Issue date
Dec 5, 1995
Hitachi, Ltd.
Hiroshi Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of processing a sample using a charged beam and reactive gas...
Patent number
5,447,614
Issue date
Sep 5, 1995
Hitachi, Ltd.
Yuuichi Hamamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical mask and method of correcting the same
Patent number
5,439,763
Issue date
Aug 8, 1995
Hitachi, Ltd.
Akira Shimase
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift mask, method of correcting the same and apparatus for c...
Patent number
5,358,806
Issue date
Oct 25, 1994
Hitachi, Ltd.
Satoshi Haraichi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for processing a sample using a charged beam and reactive...
Patent number
5,342,448
Issue date
Aug 30, 1994
Hitachi, Ltd.
Yuuichi Hamamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Combination apparatus having a scanning electron microscope therein
Patent number
5,229,607
Issue date
Jul 20, 1993
Hitachi, Ltd.
Hironobu Matsui
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Ion beam processing method and apparatus
Patent number
5,223,109
Issue date
Jun 29, 1993
Hitachi, Ltd.
Fumikazu Itoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching a semiconductor device by an ion beam
Patent number
5,086,015
Issue date
Feb 4, 1992
Hitachi, Ltd.
Fumikazu Itoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multilayered device micro etching method and system
Patent number
5,055,696
Issue date
Oct 8, 1991
Hitachi, Ltd.
Satoshi Haraichi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of providing a semiconductor IC device with an additional co...
Patent number
5,026,664
Issue date
Jun 25, 1991
Hitachi, Ltd.
Mikio Hongo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for correcting defects of X-ray mask
Patent number
4,933,565
Issue date
Jun 12, 1990
Hitachi, Ltd.
Hiroshi Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of correcting defect in circuit pattern
Patent number
4,925,755
Issue date
May 15, 1990
Hitachi, Ltd.
Hiroshi Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor integrated circuit device and process for producing t...
Patent number
4,900,695
Issue date
Feb 13, 1990
Hitachi, Ltd.
Takahiko Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
IC wiring connecting method and resulting article
Patent number
4,868,068
Issue date
Sep 19, 1989
Hitachi, Ltd.
Hiroshi Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for ion beam work
Patent number
4,683,378
Issue date
Jul 28, 1987
Hitachi, Ltd.
Akira Shimase
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DEVICE MANUFACTURING APPARATUS AND METHOD FOR THE SAME
Publication number
20130167339
Publication date
Jul 4, 2013
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
Shiro Hara
H01 - BASIC ELECTRIC ELEMENTS