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Satoshi ITOH

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  • Nirasaki-shi, Yamanashi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing method and plasma processing apparatus
    • Patent number 11,574,808
    • Issue date Feb 7, 2023
    • Tokyo Electron Limited
    • Satoshi Itoh
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Cleaning method
    • Patent number 11,488,813
    • Issue date Nov 1, 2022
    • Tokyo Electron Limited
    • Satoshi Itoh
    • B08 - CLEANING

Patents Applicationslast 30 patents