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Satoshi Kayamori
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Tokyo, JP
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last 30 patents
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Patent Grant
Plasma processor and plasma processing method
Patent number
9,728,381
Issue date
Aug 8, 2017
Tokyo Electron Limited
Akihiro Kikuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processor and plasma processing method
Patent number
9,437,402
Issue date
Sep 6, 2016
Tokyo Electron Limited
Akihiro Kikuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processor and plasma processing method
Patent number
8,904,957
Issue date
Dec 9, 2014
Tokyo Electron Limited
Akihiro Kikuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processor and plasma processing method
Patent number
8,387,562
Issue date
Mar 5, 2013
Tokyo Electron Limited
Akihiro Kikuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma procesor and plasma processing method
Patent number
8,056,503
Issue date
Nov 15, 2011
Tokyo Electron Limited
Akihiro Kikuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
PLASMA PROCESSOR AND PLASMA PROCESSING METHOD
Publication number
20150083332
Publication date
Mar 26, 2015
TOKYO ELECTRON LIMITED
Akihiro KIKUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSOR AND PLASMA PROCESSING METHOD
Publication number
20150083333
Publication date
Mar 26, 2015
TOKYO ELECTRON LIMITED
Akihiro KIKUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSOR AND PLASMA PROCESSING METHOD
Publication number
20130174983
Publication date
Jul 11, 2013
TOKYO ELECTRON LIMITED
Akihiro KIKUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSOR AND PLASMA PROCESSING METHOD
Publication number
20120006492
Publication date
Jan 12, 2012
TOKYO ELECTRON LIMITED
Akihiro KIKUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma procesor and plasma processing method
Publication number
20040177927
Publication date
Sep 16, 2004
Akihiro Kikuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...