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Satoshi Kubo
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for calculating position or angle of inspection target, stor...
Patent number
11,835,370
Issue date
Dec 5, 2023
Canon Kabushiki Kaisha
Satoshi Kubo
G01 - MEASURING TESTING
Information
Patent Grant
Exposure apparatus, method of obtaining amount of regulation of obj...
Patent number
9,310,695
Issue date
Apr 12, 2016
Canon Kabushiki Kaisha
Youzou Fukagawa
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR CALCULATING POSITION OR ANGLE OF INSPECTION TARGET, STOR...
Publication number
20220228889
Publication date
Jul 21, 2022
Canon Kabushiki Kaisha
Satoshi Kubo
G01 - MEASURING TESTING
Information
Patent Application
HOLDING APPARATUS, MEASUREMENT APPARATUS, AND ARTICLE MANUFACTURING...
Publication number
20170328705
Publication date
Nov 16, 2017
Canon Kabushiki Kaisha
Satoshi Kubo
G01 - MEASURING TESTING
Information
Patent Application
EXPOSURE APPARATUS, METHOD OF OBTAINING AMOUNT OF REGULATION OF OBJ...
Publication number
20140313499
Publication date
Oct 23, 2014
Youzou Fukagawa
G02 - OPTICS