Satoshi Kume

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wet etching method using ultraviolet-light and method of manufactur...
- Patent number 7,935,266
- Issue date May 3, 2011
- Renesas Electronics Corporation
- Satoshi Kume
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 7,537,987
- Issue date May 26, 2009
- Renesas Technology Corp.
- Masahiko Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of cleaning a substrate
- Patent number 6,880,563
- Issue date Apr 19, 2005
- Semiconductor Leading Edge Technologies, Inc.
- Satoshi Kume
- B08 - CLEANING
Information Patent Grant
Method for fabricating semiconductor device
- Patent number 6,613,636
- Issue date Sep 2, 2003
- Matsushita Electric Industrial Co., Ltd.
- Yukihisa Wada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WET ETCHING METHOD USING ULTRAVIOLET LIGHT AND METHOD OF MANUFACTUR...
- Publication number 20080113518
- Publication date May 15, 2008
- Renesas Technology Corp.
- Satoshi Kume
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20070099406
- Publication date May 3, 2007
- Renesas Technology Corp.
- Masahiko Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method of cleaning a sustrate
- Publication number 20060207631
- Publication date Sep 21, 2006
- RENESAS TECHNOLOGY CORP.
- Satoshi Kume
- B08 - CLEANING
Information Patent Application
Apparatus and method of cleaning a substrate
- Publication number 20050155623
- Publication date Jul 21, 2005
- Semiconductor Leading Edge Technologies, Inc.
- Satoshi Kume
- B08 - CLEANING
Information Patent Application
Wet etching apparatus and wet etching method using ultraviolet light
- Publication number 20040211756
- Publication date Oct 28, 2004
- Semiconductor Leading Edge Technologies, Inc.
- Satoshi Kume
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ultraviolet-light radiating apparatus, wet etching apparatus and we...
- Publication number 20040209194
- Publication date Oct 21, 2004
- Semiconductor Leading Edge Technologies, Inc.
- Satoshi Kume
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating semiconductor device
- Publication number 20020192915
- Publication date Dec 19, 2002
- Matsushita Electric Industrial Co., Ltd.
- Yukihisa Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method of cleaning a substrate
- Publication number 20020096189
- Publication date Jul 25, 2002
- Semiconductor Leading Edge Technologies, Inc.
- Satoshi Kume
- H01 - BASIC ELECTRIC ELEMENTS

Satoshi Kume

Person

Patents Grantslast 30 patents

Wet etching method using ultraviolet-light and method of manufactur...

Semiconductor device manufacturing method

Apparatus and method of cleaning a substrate

Method for fabricating semiconductor device

Patents Applicationslast 30 patents

WET ETCHING METHOD USING ULTRAVIOLET LIGHT AND METHOD OF MANUFACTUR...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

Apparatus and method of cleaning a sustrate

Apparatus and method of cleaning a substrate

Wet etching apparatus and wet etching method using ultraviolet light

Ultraviolet-light radiating apparatus, wet etching apparatus and we...

Method for fabricating semiconductor device

Apparatus and method of cleaning a substrate