Satoshi Maebashi

Person

  • Nirasaki-shi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus

    • Patent number 8,038,833
    • Issue date Oct 18, 2011
    • Tokyo Electron Limited
    • Satoshi Maebashi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents