Satoshi MIZUNAGA

Person

Iwate, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid raw material supplying method and gas supply apparatus
- Patent number 12,344,936
- Issue date Jul 1, 2025
- TOLYO ELECTRON LIMITED
- Hiroaki Dewa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 10,460,950
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Akinobu Kakimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of forming carbon film
- Patent number 9,378,944
- Issue date Jun 28, 2016
- Tokyo Electron Limited
- Tomoyuki Obu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and method of operating the same
- Patent number 9,279,183
- Issue date Mar 8, 2016
- Tokyo Electron Limited
- Atsushi Endo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and method of operating the same
- Patent number 8,993,456
- Issue date Mar 31, 2015
- Tokyo Electron Limited
- Atsushi Endo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and method for using the same
- Patent number 7,959,737
- Issue date Jun 14, 2011
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LIQUID RAW MATERIAL SUPPLYING METHOD AND GAS SUPPLY APPARATUS
- Publication number 20240093371
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Hiroaki DEWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220415661
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20220415660
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20200035496
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20200035497
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20170125255
- Publication date May 4, 2017
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING CARBON FILM
- Publication number 20160251755
- Publication date Sep 1, 2016
- TOKYO ELECTRON LIMITED
- Masayuki KITAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS OF FORMING CARBON FILM
- Publication number 20140011368
- Publication date Jan 9, 2014
- Tomoyuki OBU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20130109196
- Publication date May 2, 2013
- TOKYO ELECTRON LIMITED
- Atsushi ENDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20130109195
- Publication date May 2, 2013
- TOKYO ELECTRON LIMITED
- Atsushi ENDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING A THIN FILM FORMING APPARATUS, THIN FILM FORMING...
- Publication number 20120015525
- Publication date Jan 19, 2012
- TOKYO ELECTRON LIMITED
- Atsushi ENDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation apparatus and method for using the same
- Publication number 20080132079
- Publication date Jun 5, 2008
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Satoshi MIZUNAGA

Person

Patents Grantslast 30 patents

Liquid raw material supplying method and gas supply apparatus

Substrate processing system and substrate processing method

Method and apparatus of forming carbon film

Film forming apparatus and method of operating the same

Film forming apparatus and method of operating the same

Film formation apparatus and method for using the same

Patents Applicationslast 30 patents

LIQUID RAW MATERIAL SUPPLYING METHOD AND GAS SUPPLY APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

METHOD AND APPARATUS FOR FORMING CARBON FILM

METHOD AND APPARATUS OF FORMING CARBON FILM

FILM FORMING APPARATUS AND METHOD OF OPERATING THE SAME

FILM FORMING APPARATUS AND METHOD OF OPERATING THE SAME

METHOD OF CLEANING A THIN FILM FORMING APPARATUS, THIN FILM FORMING...

Film formation apparatus and method for using the same