Satoshi Morita

Person

Kumamoto-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus with electronic heater powered by po...
- Patent number 11,862,489
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Satoshi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus with moving device for connecting an...
- Patent number 11,637,035
- Issue date Apr 25, 2023
- Tokyo Electron Limited
- Satoshi Morita
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus including periphery cover body
- Patent number 11,551,945
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Katsuhiro Morikawa
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,510,284
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Satoshi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,208,725
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Kouichi Mizunaga
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Processing apparatus, abnormality detection method, and storage medium
- Patent number 11,094,568
- Issue date Aug 17, 2021
- Tokyo Electron Limited
- Kenji Nakamizo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system
- Patent number 11,018,035
- Issue date May 25, 2021
- Tokyo Electron Limited
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, control method of substrate process...
- Patent number 11,011,436
- Issue date May 18, 2021
- Tokyo Electron Limited
- Yoshifumi Amano
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,707,109
- Issue date Jul 7, 2020
- Tokyo Electron Limited
- Satoshi Morita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus and processing method of substrate p...
- Patent number 10,217,628
- Issue date Feb 26, 2019
- Tokyo Electron Limited
- Yoshifumi Amano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management method of substrate processing apparatus and substrate p...
- Patent number 10,128,137
- Issue date Nov 13, 2018
- Tokyo Electron Limited
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and recordin...
- Patent number 9,073,103
- Issue date Jul 7, 2015
- Tokyo Electron Limited
- Satoshi Morita
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate processing method, and co...
- Patent number 9,039,863
- Issue date May 26, 2015
- Tokyo Electron Limited
- Shuhei Matsumoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus
- Patent number 8,978,670
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Junya Minamida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus, substrate processing method, and co...
- Patent number 8,654,325
- Issue date Feb 18, 2014
- Tokyo Electron Limited
- Kenji Nakamizo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid supplying device
- Patent number 6,015,066
- Issue date Jan 18, 2000
- Tokyo Electron Limited
- Yoshio Kimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating apparatus and method of controlling the same
- Patent number 5,908,657
- Issue date Jun 1, 1999
- Tokyo Electron Limited
- Yoshio Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for supplying a treatment material
- Patent number 5,733,375
- Issue date Mar 31, 1998
- Tokyo Electron Limited
- Takahide Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating apparatus and method of controlling the same
- Patent number 5,711,809
- Issue date Jan 27, 1998
- Tokyo Electron Limited
- Yoshio Kimura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20210257236
- Publication date Aug 19, 2021
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210118706
- Publication date Apr 22, 2021
- TOKYO ELECTRON LIMITED
- Satoshi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200105550
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200105574
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200107404
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200102654
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Kouichi Mizunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190096730
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Satoshi Morita
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20190043742
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS, ABNORMALITY DETECTION METHOD, AND STORAGE MEDIUM
- Publication number 20180308730
- Publication date Oct 25, 2018
- TOKYO ELECTRON LIMITED
- Kenji NAKAMIZO
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD OF SUBSTRATE P...
- Publication number 20170287703
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD OF SUBSTRATE PROCESS...
- Publication number 20170287704
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANAGEMENT METHOD OF SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE P...
- Publication number 20170287750
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...
- Publication number 20130334172
- Publication date Dec 19, 2013
- TOKYO ELECTRON LIMITED
- Shuhei Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...
- Publication number 20130010289
- Publication date Jan 10, 2013
- Kenji Nakamizo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Processing Apparatus, Liquid Processing Method, and Recordin...
- Publication number 20120227768
- Publication date Sep 13, 2012
- TOKYO ELECTRON LIMITED
- Satoshi MORITA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110079252
- Publication date Apr 7, 2011
- TOKYO ELECTRON LIMITED
- Junya MINAMIDA
- H01 - BASIC ELECTRIC ELEMENTS

Satoshi Morita

Person

Patents Grantslast 30 patents

Substrate processing apparatus with electronic heater powered by po...

Substrate processing apparatus with moving device for connecting an...

Substrate processing apparatus including periphery cover body

Substrate processing apparatus

Substrate processing apparatus

Processing apparatus, abnormality detection method, and storage medium

Substrate processing system

Substrate processing apparatus, control method of substrate process...

Substrate processing apparatus

Substrate processing apparatus and processing method of substrate p...

Management method of substrate processing apparatus and substrate p...

Liquid processing apparatus, liquid processing method, and recordin...

Substrate processing apparatus, substrate processing method, and co...

Substrate processing apparatus

Substrate processing apparatus, substrate processing method, and co...

Liquid supplying device

Coating apparatus and method of controlling the same

Apparatus for supplying a treatment material

Coating apparatus and method of controlling the same

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM

PROCESSING APPARATUS, ABNORMALITY DETECTION METHOD, AND STORAGE MEDIUM

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD OF SUBSTRATE P...

SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD OF SUBSTRATE PROCESS...

MANAGEMENT METHOD OF SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE P...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...

Liquid Processing Apparatus, Liquid Processing Method, and Recordin...

SUBSTRATE PROCESSING APPARATUS