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Satoshi Ninomiya
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Kyoto, JP
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last 30 patents
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Cluster jet processing method, semiconductor element, microelectrom...
Patent number
8,461,051
Issue date
Jun 11, 2013
Iwatani Corporation
Kunihiko Koike
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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CLUSTER JET PROCESSING METHOD, SEMICONDUCTOR ELEMENT, MICROELECTROM...
Publication number
20110147896
Publication date
Jun 23, 2011
IWATANI CORPORATION
Kunihiko Koike
B81 - MICRO-STRUCTURAL TECHNOLOGY