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Satoshi Ohuchida
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Miyagi, JP
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last 30 patents
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Patent Grant
Substrate processing method, component processing method, and subst...
Patent number
11,798,793
Issue date
Oct 24, 2023
Tokyo Electron Limited
Satoshi Ohuchida
B08 - CLEANING
Information
Patent Grant
Etching method and plasma processing apparatus
Patent number
11,417,535
Issue date
Aug 16, 2022
Tokyo Electron Limited
Takahiro Yokoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and etching apparatus
Patent number
11,139,169
Issue date
Oct 5, 2021
Tokyo Electron Limited
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING SYSTEM, PLASMA PROCESSING APPARATUS, AND ETCHING...
Publication number
20240112918
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Noboru SAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20240063026
Publication date
Feb 22, 2024
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBST...
Publication number
20240006168
Publication date
Jan 4, 2024
TOKYO ELECTRON LIMITED
Satoshi OHUCHIDA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230395390
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20230377850
Publication date
Nov 23, 2023
TOKYO ELECTRON LIMITED
Satoshi OHUCHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20230317466
Publication date
Oct 5, 2023
TOKYO ELECTRON LIMITED
Satoshi OHUCHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20230268191
Publication date
Aug 24, 2023
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20230135998
Publication date
May 4, 2023
TOKYO ELECTRON LIMITED
Satoshi OHUCHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220328323
Publication date
Oct 13, 2022
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBST...
Publication number
20220238315
Publication date
Jul 28, 2022
TOKYO ELECTRON LIMITED
Satoshi OHUCHIDA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220165578
Publication date
May 26, 2022
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20210143017
Publication date
May 13, 2021
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20200402800
Publication date
Dec 24, 2020
TOKYO ELECTRON LIMITED
Sho Kumakura
H01 - BASIC ELECTRIC ELEMENTS