Satoshi Okamura

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,057,327
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Masataka Gosho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and method for supplying processing fluid
- Patent number 11,735,439
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Yasuo Kiyohara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and control method thereof
- Patent number 11,557,492
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Satoshi Biwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and method for supplying processing fluid
- Patent number 11,482,427
- Issue date Oct 25, 2022
- Tokyo Electron Limited
- Yasuo Kiyohara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus having cooling member
- Patent number 10,679,845
- Issue date Jun 9, 2020
- Tokyo Electron Limited
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,593,571
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,381,246
- Issue date Aug 13, 2019
- Tokyo Electron Limited
- Satoshi Okamura
- B08 - CLEANING
Information Patent Grant
Processing apparatus
- Patent number 9,496,158
- Issue date Nov 15, 2016
- Tokyo Electron Limited
- Mikio Nakashima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240371661
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230187233
- Publication date Jun 15, 2023
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD FOR SUPPLYING PROCESSING FLUID
- Publication number 20230028053
- Publication date Jan 26, 2023
- TOKYO ELECTRON LIMITED
- Yasuo Kiyohara
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220074660
- Publication date Mar 10, 2022
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- F26 - DRYING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20200388512
- Publication date Dec 10, 2020
- TOKYO ELECTRON LIMITED
- Satoshi BIWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200168482
- Publication date May 28, 2020
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD FOR SUPPLYING PROCESSING FLUID
- Publication number 20200098594
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Yasuo Kiyohara
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190206702
- Publication date Jul 4, 2019
- TOKYO ELECTRON LIMITED
- Masataka GOSHO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20180138058
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Keisuke Egashira
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180138060
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Satoshi Okamura
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170287742
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20170256398
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Hiroaki Inadomi
- B08 - CLEANING
Information Patent Application
PROCESSING APPARATUS
- Publication number 20120266925
- Publication date Oct 25, 2012
- Mikio Nakashima
- H01 - BASIC ELECTRIC ELEMENTS

Satoshi Okamura

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing system and method for supplying processing fluid

Substrate processing apparatus and control method thereof

Substrate processing system and method for supplying processing fluid

Substrate processing apparatus having cooling member

Substrate processing apparatus

Substrate processing apparatus

Processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND METHOD FOR SUPPLYING PROCESSING FLUID

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD THEREOF

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND METHOD FOR SUPPLYING PROCESSING FLUID

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

PROCESSING APPARATUS