Satoshi Osabe

Follow

Person

Higashimurayama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for polishing surface of semiconductor device substrate
- Patent number 6,663,468
- Issue date Dec 16, 2003
- Hitachi, Ltd.
- Yoshio Kawamura
- B24 - GRINDING POLISHING
Information Patent Grant
Surface analyzing method and its apparatus
- Patent number 5,714,757
- Issue date Feb 3, 1998
- Hitachi, Ltd.
- Naoshi Itabashi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method for polishing surface of semiconductor device substrate
- Publication number 20040048554
- Publication date Mar 11, 2004
- Hitachi, Ltd.
- Yoshio Kawamura
- B24 - GRINDING POLISHING
Information Patent Application
Method for polishing surface of semicon-ductor device substrate
- Publication number 20010007795
- Publication date Jul 12, 2001
- Yoshio Kawamura
- B24 - GRINDING POLISHING