Satoshi Shikami

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Okayama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus
- Patent number 6,874,516
- Issue date Apr 5, 2005
- m·FSI Ltd.
- Kousaku Matsuno
- B08 - CLEANING
Information Patent Grant
Slurry mixing feeder and slurry mixing and feeding method
- Patent number 6,767,124
- Issue date Jul 27, 2004
- m·FSI Ltd.
- Satoshi Shikami
- B24 - GRINDING POLISHING
Information Patent Grant
Supporting fixture of substrate and drying method of substrate surf...
- Patent number 6,722,055
- Issue date Apr 20, 2004
- m·FSI Ltd.
- Satoshi Shikami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate cleaning apparatus
- Publication number 20050183749
- Publication date Aug 25, 2005
- m . FSI LTD.
- Kousaku Matsuno
- B08 - CLEANING
Information Patent Application
Substrate cleaning apparatus
- Publication number 20050183750
- Publication date Aug 25, 2005
- m . FSI LTD.
- Kousaku Matsuno
- B08 - CLEANING
Information Patent Application
Substrate cleaning apparatus
- Publication number 20050150530
- Publication date Jul 14, 2005
- m . FSI LTD.
- Kousaku Matsuno
- B08 - CLEANING
Information Patent Application
Supporting fixture of substrate and drying method of substrate surf...
- Publication number 20030056391
- Publication date Mar 27, 2003
- m . FSI LTD.
- Satoshi Shikami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Slurry mixing feeder and slurry mixing and feeding method
- Publication number 20030031086
- Publication date Feb 13, 2003
- m . FSI LTD.
- Satoshi Shikami
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Substrate Cleaning apparatus
- Publication number 20030005948
- Publication date Jan 9, 2003
- m . FSI LTD.
- Kousaku Matsuno
- H01 - BASIC ELECTRIC ELEMENTS