Satoshi Shimamoto

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,094,532
- Issue date Aug 17, 2021
- Kokusai Electric Corporation
- Atsushi Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,910,214
- Issue date Feb 2, 2021
- Kokusai Electric Corporation
- Yoshitomo Hashimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,720,325
- Issue date Jul 21, 2020
- Kokusai Electric Corporation
- Takafumi Nitta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,607,833
- Issue date Mar 31, 2020
- Kokusai Electric Corporation
- Katsuyoshi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,604,842
- Issue date Mar 31, 2020
- Kokusai Electric Corporation
- Katsuyoshi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,490,400
- Issue date Nov 26, 2019
- Kokusai Electric Corporation
- Katsuyoshi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,290,492
- Issue date May 14, 2019
- Kokusai Electric Corporation
- Katsuyoshi Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,199,219
- Issue date Feb 5, 2019
- Hitachi Kokusai Electric, Inc.
- Satoshi Shimamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,163,910
- Issue date Dec 25, 2018
- Hitachi Kokusai Electric Inc.
- Satoshi Shimamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,134,586
- Issue date Nov 20, 2018
- Hitachi Kokusai Electric Inc.
- Takafumi Nitta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,115,583
- Issue date Oct 30, 2018
- Hitachi Kokusai Electric Inc.
- Satoshi Shimamoto
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,090,322
- Issue date Oct 2, 2018
- Hitachi Kokusai Electric Inc.
- Satoshi Shimamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,066,298
- Issue date Sep 4, 2018
- HITACHI KOKUSAI ELECTRIC INC.
- Ryuji Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,032,629
- Issue date Jul 24, 2018
- Hitachi Kokusai Electric Inc.
- Takafumi Nitta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,991,179
- Issue date Jun 5, 2018
- Hitachi Kokusai Electric, Inc.
- Naofumi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device including forming a fi...
- Patent number 9,978,587
- Issue date May 22, 2018
- Hitachi Kokusai Electric Inc.
- Satoshi Shimamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,929,005
- Issue date Mar 27, 2018
- Hitachi Kokusai Electric Inc.
- Satoshi Shimamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,899,211
- Issue date Feb 20, 2018
- Hitachi Kokusai Electric, Inc.
- Kaori Kirikihira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,890,458
- Issue date Feb 13, 2018
- Hitachi Kokusai Electric, Inc.
- Ryuji Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,865,458
- Issue date Jan 9, 2018
- Hitachi Kokusai Electric Inc.
- Ryuji Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,837,261
- Issue date Dec 5, 2017
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,831,082
- Issue date Nov 28, 2017
- Hitachi Kokusai Electric Inc.
- Satoshi Shimamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,793,107
- Issue date Oct 17, 2017
- Hitachi Kokusai Electric Inc.
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,773,661
- Issue date Sep 26, 2017
- Hitachi Kokusai Electric Inc.
- Takafumi Nitta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,741,556
- Issue date Aug 22, 2017
- Hitachi Kokusai Electric, Inc.
- Ryuji Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,732,426
- Issue date Aug 15, 2017
- Hitachi Kokusai Electric Inc.
- Satoshi Shimamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,698,007
- Issue date Jul 4, 2017
- Hitachi Kokusai Electric Inc.
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device having 3D structure
- Patent number 9,685,455
- Issue date Jun 20, 2017
- Hitachi Kokusai Electric, Inc.
- Satoshi Shimamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,673,043
- Issue date Jun 6, 2017
- Hitachi Kokusai Electric Inc.
- Takaaki Noda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,640,387
- Issue date May 2, 2017
- Hitachi Kokusai Electric Inc.
- Ryuji Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200152444
- Publication date May 14, 2020
- Kokusai Electric Corporation
- Atsushi SANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190393057
- Publication date Dec 26, 2019
- Kokusai Electric Corporation
- Satoshi SHIMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20190218666
- Publication date Jul 18, 2019
- Kokusai Electric Corporation
- Katsuyoshi HARADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20180337031
- Publication date Nov 22, 2018
- Hitachi Kokusai Electric Inc.
- Yoshitomo HASHIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20180308681
- Publication date Oct 25, 2018
- Hitachi Kokusai Electric Inc.
- Katsuyoshi HARADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180277405
- Publication date Sep 27, 2018
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20180233348
- Publication date Aug 16, 2018
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20180218897
- Publication date Aug 2, 2018
- Hitachi Kokusai Electric Inc.
- Takafumi NITTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20180197877
- Publication date Jul 12, 2018
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20180090502
- Publication date Mar 29, 2018
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20180090310
- Publication date Mar 29, 2018
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20170365467
- Publication date Dec 21, 2017
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20170358506
- Publication date Dec 14, 2017
- HITACHI KOKUSAI ELECTRIC INC.
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20170345645
- Publication date Nov 30, 2017
- Hitachi Kokusai Electric Inc.
- Katsuyoshi HARADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20170170004
- Publication date Jun 15, 2017
- Hitachi Kokusai Electric Inc.
- Katsuyoshi HARADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20170117133
- Publication date Apr 27, 2017
- Hitachi Kokusai Electric Inc.
- Ryuji YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20170092486
- Publication date Mar 30, 2017
- Hitachi Kokusai Electric Inc.
- Takafumi NITTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device and Substrate Processi...
- Publication number 20160365243
- Publication date Dec 15, 2016
- Hitachi Kokusai Electric Inc.
- Yoshiro HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160358767
- Publication date Dec 8, 2016
- Hitachi Kokusai Electric Inc.
- Takafumi NITTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160225607
- Publication date Aug 4, 2016
- Hitachi Kokusai Electric Inc.
- Ryuji YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING FINE PATTERN, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20160218012
- Publication date Jul 28, 2016
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160211135
- Publication date Jul 21, 2016
- Hitachi Kokusai Electric Inc.
- Takaaki NODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160153090
- Publication date Jun 2, 2016
- Hitachi Kokusai Electric Inc.
- Ryuji YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20160155634
- Publication date Jun 2, 2016
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20160093512
- Publication date Mar 31, 2016
- Hitachi Kokusai Electric Inc.
- Atsuhiko SUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160071720
- Publication date Mar 10, 2016
- Hitachi Kokusai Electric Inc.
- Takafumi NITTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20160071721
- Publication date Mar 10, 2016
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- B08 - CLEANING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160064219
- Publication date Mar 3, 2016
- Hitachi Kokusai Electric Inc.
- Ryuji YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160024659
- Publication date Jan 28, 2016
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20150357181
- Publication date Dec 10, 2015
- Hitachi Kokusai Electric Inc.
- Ryuji YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Satoshi Shimamoto

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device including forming a fi...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device and substrate processi...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device having 3D structure

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Method of Manufacturing Semiconductor Device, Substrate Processing...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Method of Manufacturing Semiconductor Device

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Method of Manufacturing Semiconductor Device and Substrate Processi...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF FORMING FINE PATTERN, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Method of Manufacturing Semiconductor Device, Substrate Processing...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...