Satoshi SHIMMURA

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Solution treatment apparatus and cleaning method
- Patent number 11,868,057
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Kenta Shibasaki
- B08 - CLEANING
Information Patent Grant
Nozzle standby device, liquid processing apparatus and operation me...
- Patent number 11,862,485
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Satoshi Shimmura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,273,464
- Issue date Mar 15, 2022
- Tokyo Electron Limited
- Satoshi Shimmura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Solution treatment apparatus and cleaning method for solution treat...
- Patent number 11,235,350
- Issue date Feb 1, 2022
- Tokyo Electron Limited
- Satoshi Shimmura
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus
- Patent number 10,379,441
- Issue date Aug 13, 2019
- Tokyo Electron Limited
- Satoshi Shimmura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
CLEANING JIG, COATING APPARATUS, AND CLEANING METHOD
- Publication number 20240207908
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Satoshi SHIMMURA
- B08 - CLEANING
Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
- Publication number 20240085813
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Kenta SHIBASAKI
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20240012329
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Junghyun KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20240009697
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Junghyun KIM
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
- Publication number 20220113643
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Kenta SHIBASAKI
- B08 - CLEANING
Information Patent Application
NOZZLE STANDBY DEVICE, LIQUID PROCESSING APPARATUS AND OPERATION ME...
- Publication number 20220084844
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Satoshi Shimmura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210039131
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Satoshi Shimmura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD FOR SOLUTION TREAT...
- Publication number 20190255561
- Publication date Aug 22, 2019
- TOKYO ELECTRON LIMITED
- Satoshi SHIMMURA
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20180373151
- Publication date Dec 27, 2018
- TOKYO ELECTRON LIMITED
- Satoshi SHIMMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Satoshi SHIMMURA

Person

Patents Grantslast 30 patents

Solution treatment apparatus and cleaning method

Nozzle standby device, liquid processing apparatus and operation me...

Substrate processing apparatus

Solution treatment apparatus and cleaning method for solution treat...

Liquid processing apparatus

Patents Applicationslast 30 patents

CLEANING JIG, COATING APPARATUS, AND CLEANING METHOD

SOLUTION TREATMENT APPARATUS AND CLEANING METHOD

LIQUID PROCESSING APPARATUS

LIQUID PROCESSING APPARATUS

SOLUTION TREATMENT APPARATUS AND CLEANING METHOD

NOZZLE STANDBY DEVICE, LIQUID PROCESSING APPARATUS AND OPERATION ME...

SUBSTRATE PROCESSING APPARATUS

SOLUTION TREATMENT APPARATUS AND CLEANING METHOD FOR SOLUTION TREAT...

LIQUID PROCESSING APPARATUS