Satoshi Taga

Person

Kurokawa-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate placing table and substrate processing apparatus
- Patent number 11,676,847
- Issue date Jun 13, 2023
- Tokyo Electron Limited
- Satoshi Taga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate placing table and substrate processing apparatus
- Patent number 11,508,603
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Satoshi Taga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing electrostatic chuck and electrostsatic chuck
- Patent number 11,227,786
- Issue date Jan 18, 2022
- Tokyo Electron Limited
- Satoshi Taga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate placing table and substrate processing apparatus
- Patent number 11,217,470
- Issue date Jan 4, 2022
- Tokyo Electron Limited
- Satoshi Taga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and susceptor
- Patent number 10,941,477
- Issue date Mar 9, 2021
- Tokyo Electron Limited
- Satoshi Taga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and susceptor
- Patent number 10,557,190
- Issue date Feb 11, 2020
- Tokyo Electron Limited
- Satoshi Taga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method using reversible decomposition reaction
- Patent number 9,976,217
- Issue date May 22, 2018
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode manufacturing apparatus for lithium ion capacitor
- Patent number 9,777,362
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Yoshiyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode manufacturing apparatus for lithium ion capacitor and ele...
- Patent number 9,587,300
- Issue date Mar 7, 2017
- Tokyo Electron Limited
- Yoshiyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition device
- Patent number 9,404,180
- Issue date Aug 2, 2016
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate mounting mechanism, and substrate processing apparatus
- Patent number 9,202,728
- Issue date Dec 1, 2015
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for film formation, apparatus for film formation, and comput...
- Patent number 9,062,374
- Issue date Jun 23, 2015
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mounting table structure, film forming apparatus and raw material r...
- Patent number 8,992,686
- Issue date Mar 31, 2015
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 8,277,889
- Issue date Oct 2, 2012
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for film formation, apparatus for film formation, and comput...
- Patent number 8,273,409
- Issue date Sep 25, 2012
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240321559
- Publication date Sep 26, 2024
- TOKYO ELECTRON LIMITED
- Satoshi TAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS
- Publication number 20240038507
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Satoshi TAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230065448
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Satoshi TAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220084867
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Satoshi TAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200211885
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Satoshi TAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUSCEPTOR
- Publication number 20200115786
- Publication date Apr 16, 2020
- TOKYO ELECTRON LIMITED
- Satoshi TAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING ELECTROSTATIC CHUCK AND ELECTROSTSATIC CHUCK
- Publication number 20190013230
- Publication date Jan 10, 2019
- TOKYO ELECTRON LIMITED
- Satoshi TAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE MANUFACTURING APPARATUS FOR LITHIUM ION CAPACITOR
- Publication number 20170130312
- Publication date May 11, 2017
- TOKYO ELECTRON LIMITED
- Yoshiyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLACING TABLE STRUCTURE
- Publication number 20150044368
- Publication date Feb 12, 2015
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOPPER AND THERMAL SPRAYING APPARATUS
- Publication number 20140251212
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Yoshiyuki KOBAYASHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUSCEPTOR
- Publication number 20140202386
- Publication date Jul 24, 2014
- TOKYO ELECTRON LIMITED
- Satoshi TAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE MANUFACTURING APPARATUS FOR LITHIUM ION CAPACITOR AND ELE...
- Publication number 20140178594
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Yoshiyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION DEVICE
- Publication number 20130000558
- Publication date Jan 3, 2013
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING MECHANISM, AND SUBSTRATE PROCESSING
- Publication number 20120199573
- Publication date Aug 9, 2012
- TOKYO ELECTRON LIMITED
- Masamichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOUNTING TABLE STRUCTURE, FILM FORMING APPARATUS AND RAW MATERIAL R...
- Publication number 20120055403
- Publication date Mar 8, 2012
- TOKYO ELECTRON LIMITED
- Atsushi GOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Film Formation, Apparatus for Film Formation, and Comput...
- Publication number 20110300291
- Publication date Dec 8, 2011
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLACING TABLE STRUCTURE
- Publication number 20110263123
- Publication date Oct 27, 2011
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FILM FORMATION, APPARATUS FOR FILM FORMATION, AND COMPUT...
- Publication number 20110092070
- Publication date Apr 21, 2011
- TOKYO ELECTRON LIMITED
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY SYSTEM AND FILM FORMING APPARATUS
- Publication number 20100236480
- Publication date Sep 23, 2010
- TOKYO ELECTRON LIMITED
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS HAV...
- Publication number 20100212594
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Masamichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE MOUNTING MECHANISM, SUBSTRATE PROCESSING APPARATUS, METHO...
- Publication number 20100210115
- Publication date Aug 19, 2010
- TOKYO ELECTRON LIMITED
- Masamichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20100075035
- Publication date Mar 25, 2010
- TOKYO ELECTRON LIMITED,
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY METHOD AND GAS SUPPLY DEVICE
- Publication number 20100062158
- Publication date Mar 11, 2010
- TOKYO ELECTRON LIMITED
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Satoshi Taga

Person

Patents Grantslast 30 patents

Substrate placing table and substrate processing apparatus

Substrate placing table and substrate processing apparatus

Method of manufacturing electrostatic chuck and electrostsatic chuck

Substrate placing table and substrate processing apparatus

Substrate processing apparatus and susceptor

Substrate processing apparatus and susceptor

Film forming method using reversible decomposition reaction

Electrode manufacturing apparatus for lithium ion capacitor

Electrode manufacturing apparatus for lithium ion capacitor and ele...

Deposition device

Substrate mounting mechanism, and substrate processing apparatus

Method for film formation, apparatus for film formation, and comput...

Mounting table structure, film forming apparatus and raw material r...

Film formation method and film formation apparatus

Method for film formation, apparatus for film formation, and comput...

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS

SUBSTRATE PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUSCEPTOR

METHOD OF MANUFACTURING ELECTROSTATIC CHUCK AND ELECTROSTSATIC CHUCK

ELECTRODE MANUFACTURING APPARATUS FOR LITHIUM ION CAPACITOR

PLACING TABLE STRUCTURE

HOPPER AND THERMAL SPRAYING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUSCEPTOR

ELECTRODE MANUFACTURING APPARATUS FOR LITHIUM ION CAPACITOR AND ELE...

DEPOSITION DEVICE

SUBSTRATE MOUNTING MECHANISM, AND SUBSTRATE PROCESSING

MOUNTING TABLE STRUCTURE, FILM FORMING APPARATUS AND RAW MATERIAL R...

Method for Film Formation, Apparatus for Film Formation, and Comput...

PLACING TABLE STRUCTURE

METHOD FOR FILM FORMATION, APPARATUS FOR FILM FORMATION, AND COMPUT...

RAW MATERIAL GAS SUPPLY SYSTEM AND FILM FORMING APPARATUS

SUBSTRATE MOUNTING MECHANISM AND SUBSTRATE PROCESSING APPARATUS HAV...

SUBSTRATE MOUNTING MECHANISM, SUBSTRATE PROCESSING APPARATUS, METHO...

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

GAS SUPPLY METHOD AND GAS SUPPLY DEVICE