Satoshi TAKEDA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Stage device, power supply mechanism, and processing apparatus
- Patent number 11,640,918
- Issue date May 2, 2023
- Tokyo Electron Limited
- Satoshi Takeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate stage and substrate processing apparatus
- Patent number 11,281,116
- Issue date Mar 22, 2022
- Tokyo Electron Limited
- Einosuke Tsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20230096191
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Takeshi ITATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE STAGE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210302846
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Einosuke TSUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD OF MANUFACTURING SUBSTRATE P...
- Publication number 20210287916
- Publication date Sep 16, 2021
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE, POWER SUPPLY MECHANISM, AND PROCESSING APPARATUS
- Publication number 20210249295
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Satoshi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS