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Room temperature bonding apparatus
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Patent number 8,906,175
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Issue date Dec 9, 2014
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Mitsubishi Heavy Industries, Ltd.
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Masato Kinouchi
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Wafer bonding apparatus
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Patent number 8,578,993
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Issue date Nov 12, 2013
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Mitsubishi Heavy Industries, Ltd.
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Satoshi Tawara
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Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Grinding swarf collector
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Patent number 6,267,657
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Issue date Jul 31, 2001
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Mitsubishi Heavy Industries, Ltd.
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Satoshi Tawara
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR