Satoshi Tochiori

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Kawagoe, JP

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Patents Grantslast 30 patents

Information Patent Grant
Control apparatus
- Patent number 6,442,446
- Issue date Aug 27, 2002
- Tokyo Electron Limited
- Tsuyoshi Nakamura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process control system and method for transferring process data the...
- Patent number 6,233,492
- Issue date May 15, 2001
- Tokyo Electron Limited
- Tsuyoshi Nakamura
- G05 - CONTROLLING REGULATING
Information Patent Grant
Operating system for fabrication apparatus
- Patent number 6,122,556
- Issue date Sep 19, 2000
- Tokyo Electron Limited
- Satoshi Tochiori
- G05 - CONTROLLING REGULATING