Satoshi TODA

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method and etching apparatus
- Patent number 11,764,070
- Issue date Sep 19, 2023
- Tokyo Electron Limited
- Satoshi Toda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 11,335,567
- Issue date May 17, 2022
- Tokyo Electron Limited
- Naoki Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 11,127,597
- Issue date Sep 21, 2021
- Tokyo Electron Limited
- Reiko Sasahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 10,460,949
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Hiroyuki Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 10,256,107
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Muneyuki Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and storage medium
- Patent number 9,691,631
- Issue date Jun 27, 2017
- Tokyo Electron Limited
- Satoshi Toda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method, etching apparatus and storage medium
- Patent number 9,646,848
- Issue date May 9, 2017
- Tokyo Electron Limited
- Satoshi Toda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,490,151
- Issue date Nov 8, 2016
- Tokyo Electron Limited
- Yuji Asakawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20230014819
- Publication date Jan 19, 2023
- Tokyo Electron Limited
- Satoshi TODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20220213596
- Publication date Jul 7, 2022
- TOKYO ELECTRON LIMITED
- Satoshi TODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20220068657
- Publication date Mar 3, 2022
- Tokyo Electron Limited
- Koji TAKEYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20220020601
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Satoshi TODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING APPARATUS AND ETCHING METHOD
- Publication number 20210090912
- Publication date Mar 25, 2021
- TOKYO ELECTRON LIMITED
- Naoki SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20210090898
- Publication date Mar 25, 2021
- TOKYO ELECTRON LIMITED
- Naoki SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD
- Publication number 20200111674
- Publication date Apr 9, 2020
- TOKYO ELECTRON LIMITED
- Reiko SASAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20190378724
- Publication date Dec 12, 2019
- TOKYO ELECTRON LIMITED
- Satoshi TODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20190153599
- Publication date May 23, 2019
- Tokyo Electron Limited
- Satoshi TODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20170243753
- Publication date Aug 24, 2017
- Muneyuki IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20160111304
- Publication date Apr 21, 2016
- TOKYO ELECTRON LIMITED
- Hiroyuki TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND STORAGE MEDIUM
- Publication number 20160079081
- Publication date Mar 17, 2016
- TOKYO ELECTRON LIMITED
- Satoshi TODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160027672
- Publication date Jan 28, 2016
- TOKYO ELECTRON LIMITED
- Yuji ASAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS AND STORAGE MEDIUM
- Publication number 20160005621
- Publication date Jan 7, 2016
- TOKYO ELECTRON LIMITED
- Satoshi TODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND STORAGE MEDIUM
- Publication number 20150380268
- Publication date Dec 31, 2015
- TOKYO ELECTRON LIMITED
- Satoshi TODA
- H01 - BASIC ELECTRIC ELEMENTS

Satoshi TODA

Person

Patents Grantslast 30 patents

Etching method and etching apparatus

Etching method and etching apparatus

Etching method

Substrate processing apparatus, substrate processing method and sto...

Substrate processing method

Etching method and storage medium

Etching method, etching apparatus and storage medium

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

ETCHING METHOD AND ETCHING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

ETCHING APPARATUS AND ETCHING METHOD

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD

ETCHING METHOD AND ETCHING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

ETCHING METHOD AND STORAGE MEDIUM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ETCHING METHOD, ETCHING APPARATUS AND STORAGE MEDIUM

ETCHING METHOD AND STORAGE MEDIUM