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Satoshi Umehara
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Hitachioota, JP
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last 30 patents
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Patent Grant
Magnetic film forming apparatus which applies a parallel magnetic f...
Patent number
6,099,706
Issue date
Aug 8, 2000
Hitachi, Ltd.
Fumihito Hirabayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Multi-chamber sputtering apparatus
Patent number
5,783,055
Issue date
Jul 21, 1998
Hitachi, Ltd.
Mitsuhiro Kamei
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...