TREA

Satoshi Wakabayashi

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  • Kanagawa-ken, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Polishing device and substrate processing device
    • Patent number 7,850,817
    • Issue date Dec 14, 2010
    • Ebara Corporation
    • Satoshi Wakabayashi
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate delivery mechanism
    • Patent number 7,645,185
    • Issue date Jan 12, 2010
    • Ebara Corporation
    • Soichi Isobe
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 7,632,378
    • Issue date Dec 15, 2009
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate delivery mechanism
    • Patent number 7,160,180
    • Issue date Jan 9, 2007
    • Ebara Corporation
    • Soichi Isobe
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate delivery mechanism
    • Patent number 7,063,598
    • Issue date Jun 20, 2006
    • Ebara Corporation
    • Soichi Isobe
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,916,231
    • Issue date Jul 12, 2005
    • Ebara Corporation
    • Satoshi Wakabayashi
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,878,044
    • Issue date Apr 12, 2005
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,682,408
    • Issue date Jan 27, 2004
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Dressing apparatus and polishing apparatus
    • Patent number 6,609,962
    • Issue date Aug 26, 2003
    • Ebara Corporation
    • Satoshi Wakabayashi
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Dressing apparatus
    • Patent number 6,602,119
    • Issue date Aug 5, 2003
    • Ebara Corporation
    • Tetsuji Togawa
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Substrate holder and substrate transfer apparatus using the same
    • Patent number 6,578,891
    • Issue date Jun 17, 2003
    • Ebara Corporation
    • Hiroo Suzuki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,390,901
    • Issue date May 21, 2002
    • Ebara Corporation
    • Hirokuni Hiyama
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,379,229
    • Issue date Apr 30, 2002
    • Ebara Corporation
    • Satoshi Wakabayashi
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,358,131
    • Issue date Mar 19, 2002
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,358,126
    • Issue date Mar 19, 2002
    • Ebara Corporation
    • Robert R. Jackson
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,358,128
    • Issue date Mar 19, 2002
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Polishing apparatus
    • Patent number 6,354,922
    • Issue date Mar 12, 2002
    • Ebara Corporation
    • Kunihiko Sakurai
    • B24 - GRINDING POLISHING

Patents Applicationslast 30 patents