Satoshi Wakabayashi

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and recording medium
- Patent number 10,242,878
- Issue date Mar 26, 2019
- Tokyo Electron Limited
- Tomonari Urano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming Ti film
- Patent number 9,620,370
- Issue date Apr 11, 2017
- Tokyo Electron Limited
- Seishi Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming contact layer
- Patent number 9,349,642
- Issue date May 24, 2016
- Tokyo Electron Limited
- Seishi Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ti-based film forming method and storage medium
- Patent number 8,263,181
- Issue date Sep 11, 2012
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ti-containing film formation method and storage medium
- Patent number 8,257,790
- Issue date Sep 4, 2012
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and substrate processing apparatus
- Patent number 7,981,794
- Issue date Jul 19, 2011
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas treatment method and computer readable storage medium
- Patent number 7,906,442
- Issue date Mar 15, 2011
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming Ti film and TiN film, contact structure, compute...
- Patent number 7,737,005
- Issue date Jun 15, 2010
- Tokyo Electron Limited
- Kunihiro Tada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precoat film forming method
- Patent number 7,514,120
- Issue date Apr 7, 2009
- Tokyo Electron Limited
- Satoshi Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process of forming metal films and multi layer structure
- Patent number 6,069,093
- Issue date May 30, 2000
- Tokyo Electron Limited
- Kunihiro Tada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SOURCE GAS SUPPLY APPARATUS, FILM FORMING APPARATUS, AND SOURCE GAS...
- Publication number 20200115801
- Publication date Apr 16, 2020
- TOKYO ELECTRON LIMITED
- Satoshi WAKABAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING METAL FILM AND FILM FORMING APPARATUS
- Publication number 20190385843
- Publication date Dec 19, 2019
- TOKYO ELECTRON LIMITED
- Satoshi WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20190371572
- Publication date Dec 5, 2019
- TOKYO ELECTRON LIMITED
- Satoshi WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM
- Publication number 20170250086
- Publication date Aug 31, 2017
- Tomonari URANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING TI FILM
- Publication number 20150179462
- Publication date Jun 25, 2015
- TOKYO ELECTRON LIMITED
- Seishi MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING CONTACT LAYER
- Publication number 20150179518
- Publication date Jun 25, 2015
- TOKYO ELECTRON LIMITED
- Seishi MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20100304561
- Publication date Dec 2, 2010
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND APPARATUS UTILIZING PLASMA CVD
- Publication number 20100240216
- Publication date Sep 23, 2010
- Kunihiro Tada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING Ti-BASED FILM AND STORAGE MEDIUM
- Publication number 20100227062
- Publication date Sep 9, 2010
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING TI FILM AND TIN FILM, CONTACT STRUCTURE, COMPUTE...
- Publication number 20100216304
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Kunihiro Tada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS TREATMENT METHOD AND COMPUTER READABLE STORAGE MEDIUM
- Publication number 20100081292
- Publication date Apr 1, 2010
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ti-BASED FILM FORMING METHOD AND STORAGE MEDIUM
- Publication number 20090208650
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precoat film forming method, idling method of film forming device,...
- Publication number 20080226822
- Publication date Sep 18, 2008
- Satoshi Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film-Forming Method and Recording Medium
- Publication number 20080107825
- Publication date May 8, 2008
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Forming Ti Film and Tin Film, Contact Structure, Compute...
- Publication number 20070257372
- Publication date Nov 8, 2007
- Tokyo Electron Limited
- Kunihiro Tada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Supplying unit and substrate processing apparatus
- Publication number 20070131168
- Publication date Jun 14, 2007
- Hisashi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Worktable device, film formation apparatus, and film formation meth...
- Publication number 20050257747
- Publication date Nov 24, 2005
- Satoshi Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation method and apparatus utilizing plasma CVD
- Publication number 20050233093
- Publication date Oct 20, 2005
- Kunihiro Tada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precoat film forming method
- Publication number 20050221005
- Publication date Oct 6, 2005
- Satoshi Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precoat film forming method, idling method of film forming device,...
- Publication number 20050098109
- Publication date May 12, 2005
- TOKYO ELECTRON LIMITED
- Satoshi Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precoat film forming method
- Publication number 20030235652
- Publication date Dec 25, 2003
- Satoshi Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Precoat film forming method, idling method of film forming device,...
- Publication number 20030165620
- Publication date Sep 4, 2003
- Satoshi Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Satoshi Wakabayashi

Person

Patents Grantslast 30 patents

Substrate processing method and recording medium

Method of forming Ti film

Method of forming contact layer

Ti-based film forming method and storage medium

Ti-containing film formation method and storage medium

Film forming method and substrate processing apparatus

Gas treatment method and computer readable storage medium

Method for forming Ti film and TiN film, contact structure, compute...

Precoat film forming method

Process of forming metal films and multi layer structure

Patents Applicationslast 30 patents

SOURCE GAS SUPPLY APPARATUS, FILM FORMING APPARATUS, AND SOURCE GAS...

METHOD OF FORMING METAL FILM AND FILM FORMING APPARATUS

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM

METHOD OF FORMING TI FILM

METHOD OF FORMING CONTACT LAYER

FILM FORMING METHOD AND SUBSTRATE PROCESSING APPARATUS

FILM FORMATION METHOD AND APPARATUS UTILIZING PLASMA CVD

METHOD FOR FORMING Ti-BASED FILM AND STORAGE MEDIUM

METHOD FOR FORMING TI FILM AND TIN FILM, CONTACT STRUCTURE, COMPUTE...

GAS TREATMENT METHOD AND COMPUTER READABLE STORAGE MEDIUM

Ti-BASED FILM FORMING METHOD AND STORAGE MEDIUM

Precoat film forming method, idling method of film forming device,...

Film-Forming Method and Recording Medium

Method for Forming Ti Film and Tin Film, Contact Structure, Compute...

Gas Supplying unit and substrate processing apparatus

Worktable device, film formation apparatus, and film formation meth...

Film formation method and apparatus utilizing plasma CVD

Precoat film forming method

Precoat film forming method, idling method of film forming device,...

Precoat film forming method

Precoat film forming method, idling method of film forming device,...