Satoshi YAMADA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 10,115,567
- Issue date Oct 30, 2018
- Tokyo Electron Limited
- Taichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching apparatus and plasma etching method
- Patent number 10,090,161
- Issue date Oct 2, 2018
- Tokyo Electron Limited
- Shigeki Doba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shower head, plasma processing apparatus and plasma processing method
- Patent number 9,466,468
- Issue date Oct 11, 2016
- Tokyo Electron Limited
- Nobuyuki Okayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20170133234
- Publication date May 11, 2017
- TOKYO ELECTRON LIMITED
- Shigeki Doba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20160079037
- Publication date Mar 17, 2016
- TOKYO ELECTRON LIMITED
- Taichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MOUNTING TABLE AND PLASMA TREATMENT DEVICE
- Publication number 20140311676
- Publication date Oct 23, 2014
- TOKYO ELECTRON LIMITED
- Hideyuki Hatoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER HEAD, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20140291286
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Nobuyuki OKAYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20140017900
- Publication date Jan 16, 2014
- TOKYO ELECTRON LIMITED
- Shigeki Doba
- H01 - BASIC ELECTRIC ELEMENTS