Satoshi Yamazaki

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method, and pr...
- Patent number 8,785,216
- Issue date Jul 22, 2014
- Tokyo Electron Limited
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method, sealed co...
- Patent number 7,925,370
- Issue date Apr 12, 2011
- Tokyo Electron Limited
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, control method thereof and program for...
- Patent number 7,585,385
- Issue date Sep 8, 2009
- Tokyo Electron Limited
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method, sealed co...
- Patent number 7,462,011
- Issue date Dec 9, 2008
- Tokyo Electron Limited
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND PR...
- Publication number 20110139749
- Publication date Jun 16, 2011
- TOKYO ELECTRON LIMITED
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, SEALED CO...
- Publication number 20090043419
- Publication date Feb 12, 2009
- TOKYO ELECTRON LIMITED
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing system, substrate processing method, sealed co...
- Publication number 20060105473
- Publication date May 18, 2006
- TOKYO ELECTRON LIMITED
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus, control method thereof and program for...
- Publication number 20060005927
- Publication date Jan 12, 2006
- TOKYO ELECTRON LIMITED
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, substrate processing method, and pr...
- Publication number 20050233477
- Publication date Oct 20, 2005
- TOKYO ELECTRON LIMITED
- Satoshi Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS