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Satoshi Yonekura
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Miyagi, JP
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Patents Grants
last 30 patents
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Patent Grant
Film formation device
Patent number
10,513,777
Issue date
Dec 24, 2019
Tokyo Electron Limited
Masahide Iwasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film-forming apparatus
Patent number
9,831,067
Issue date
Nov 28, 2017
Tokyo Electron Limited
Masahide Iwasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
FILM-FORMING APPARATUS
Publication number
20150279627
Publication date
Oct 1, 2015
TOKYO ELECTRON LIMITED
Masahide Iwasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION DEVICE
Publication number
20150007774
Publication date
Jan 8, 2015
TOKYO ELECTRON LIMITED
Masahide Iwasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...