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Satoshi Yonezawa
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Takanezawa-machi, JP
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last 30 patents
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Patent Grant
Semiconductor device fabricating method and system for carrying out...
Patent number
6,399,484
Issue date
Jun 4, 2002
Tokyo Electron Limited
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...