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Satosi Kisimoto
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Yokohama, JP
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last 30 patents
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Patent Grant
Vacuum processing apparatus, and a film deposition apparatus and a...
Patent number
6,171,641
Issue date
Jan 9, 2001
Hitachi, Ltd.
Akira Okamoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum processing device and film forming device and method using same
Patent number
5,815,396
Issue date
Sep 29, 1998
Hitachi, Ltd.
Hideaki Shimamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum processing equipment, film coating equipment and deposition...
Patent number
5,707,500
Issue date
Jan 13, 1998
Hitachi, Ltd.
Hideaki Shimamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...