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Satya THOKACHICHU

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  • San Jose, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma-enhanced chemical vapor deposition of carbon hard-mask
    • Patent number 12,136,549
    • Issue date Nov 5, 2024
    • Applied Materials, Inc.
    • Byung Seok Kwon
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Methods of reducing chamber residues
    • Patent number 11,560,623
    • Issue date Jan 24, 2023
    • Applied Materials, Inc.
    • Liangfa Hu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Selective deposition of hardmask
    • Patent number 10,923,334
    • Issue date Feb 16, 2021
    • Applied Materials, Inc.
    • Satya Thokachichu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    METHODS OF REDUCING CHAMBER RESIDUES
    • Publication number 20230151487
    • Publication date May 18, 2023
    • Applied Materials, Inc.
    • Liangfa HU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK
    • Publication number 20210043455
    • Publication date Feb 11, 2021
    • Applied Materials, Inc.
    • Byung Seok KWON
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF REDUCING CHAMBER RESIDUES
    • Publication number 20200362457
    • Publication date Nov 19, 2020
    • Applied Materials, Inc.
    • Liangfa HU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SELECTIVE DEPOSITION OF HARDMASK
    • Publication number 20190341227
    • Publication date Nov 7, 2019
    • Applied Materials, Inc.
    • Satya THOKACHICHU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RF GROUNDING CONFIGURATION FOR PEDESTALS
    • Publication number 20190341232
    • Publication date Nov 7, 2019
    • Applied Materials, Inc.
    • Satya THOKACHICHU
    • H01 - BASIC ELECTRIC ELEMENTS