Saurabh Chopra

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Anisotropic sige:b epitaxial film growth for gate all around transi...
- Patent number 12,068,155
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Chen-Ying Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tools, systems, and methods having one or more pressure sta...
- Patent number 11,965,241
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Saurabh Chopra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective methods for fabricating devices and structures
- Patent number 11,948,796
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Yi-Chiau Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating a semiconductor device having reduced contact...
- Patent number 11,195,923
- Issue date Dec 7, 2021
- Applied Materials, Inc.
- Gaurav Thareja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, method of making a semiconductor device, and...
- Patent number 11,152,479
- Issue date Oct 19, 2021
- Applied Materials, Inc.
- Gaurav Thareja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for precleaning a substrate surface prior to e...
- Patent number 10,837,122
- Issue date Nov 17, 2020
- Applied Materials, Inc.
- Christopher S. Olsen
- C30 - CRYSTAL GROWTH
Information Patent Grant
Self-aligned nanodots for 3D NAND flash memory
- Patent number 10,446,392
- Issue date Oct 15, 2019
- Applied Materials, Inc.
- Sungwon Jun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for precleaning a substrate surface prior to e...
- Patent number 10,428,441
- Issue date Oct 1, 2019
- Applied Materials, Inc.
- Christopher S. Olsen
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus for precleaning a substrate surface prior to e...
- Patent number 9,683,308
- Issue date Jun 20, 2017
- Applied Materials, Inc.
- Christopher S. Olsen
- C30 - CRYSTAL GROWTH
Information Patent Grant
Epitaxy of high tensile silicon alloy for tensile strain applications
- Patent number 9,460,918
- Issue date Oct 4, 2016
- Applied Materials, Inc.
- Zhiyuan Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon addition for low resistivity in situ doped silicon epitaxy
- Patent number 9,012,328
- Issue date Apr 21, 2015
- Applied Materials, Inc.
- Zhiyuan Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Epitaxy of high tensile silicon alloy for tensile strain applications
- Patent number 8,652,945
- Issue date Feb 18, 2014
- Applied Materials, Inc.
- Zhiyuan Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of selectively depositing an epitaxial layer
- Patent number 8,207,023
- Issue date Jun 26, 2012
- Applied Materials, Inc.
- Zhiyuan Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phosphorus containing Si epitaxial layers in N-type source/drain ju...
- Patent number 7,960,236
- Issue date Jun 14, 2011
- Applied Materials, Inc.
- Saurabh Chopra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Selective formation of silicon carbon epitaxial layer
- Patent number 7,776,698
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Zhiyuan Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming conformal silicon layer for recessed source-drain
- Patent number 7,772,074
- Issue date Aug 10, 2010
- Applied Materials, Inc.
- Zhiyuan Ye
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MOVABLE CENTRAL REFLECTORS OF SEMICONDUCTOR PROCESSING EQUIPMENT, A...
- Publication number 20240360587
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCED STRAIN HETEROEPITAXY ASSEMBLY FOR THREE-DIMENSIONAL DEVICE...
- Publication number 20240347602
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Fredrick FISHBURN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...
- Publication number 20240301584
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Christopher S. OLSEN
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS
- Publication number 20240248298
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS
- Publication number 20240248282
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS
- Publication number 20240248297
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT SOURCE ARRANGEMENTS, PROCESSING CHAMBERS, AND RELATED METHODS...
- Publication number 20240234175
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT SOURCE ARRANGEMENTS, PROCESSING CHAMBERS, AND RELATED METHODS...
- Publication number 20240136207
- Publication date Apr 25, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIFORM EPITAXIAL GROWTH OVER CRYSTALLINE TEMPLATE
- Publication number 20240088222
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Shawn THOMAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...
- Publication number 20240018658
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...
- Publication number 20240018688
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Errol Antonio C. SANCHEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLUSTER TOOLS, SYSTEMS, AND METHODS HAVING ONE OR MORE PRESSURE STA...
- Publication number 20230075715
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Saurabh CHOPRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPLATE FOR NANOSHEET SOURCE DRAIN FORMATION WITH BOTTOM DIELECTRIC
- Publication number 20230040606
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Benjamin Colombeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANISOTROPIC SIGE:B EPITAXIAL FILM GROWTH FOR GATE ALL AROUND TRANSI...
- Publication number 20230037320
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Chen-Ying WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20220375751
- Publication date Nov 24, 2022
- Applied Materials, Inc.
- Yi-Chiau HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANISOTROPIC EPITAXIAL GROWTH
- Publication number 20220319844
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Chia Cheng CHIN
- C30 - CRYSTAL GROWTH
Information Patent Application
SELECTIVE METHODS FOR FABRICATING DEVICES AND STRUCTURES
- Publication number 20220310390
- Publication date Sep 29, 2022
- Yi-Chiau HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...
- Publication number 20220155148
- Publication date May 19, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE HAVING REDUCED CONTACT...
- Publication number 20220093749
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Gaurav THAREJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...
- Publication number 20210010160
- Publication date Jan 14, 2021
- Applied Materials, Inc.
- Christopher S. OLSEN
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS FOR LOW TEMPERATURE SILICIDE FORMATION
- Publication number 20200283896
- Publication date Sep 10, 2020
- Applied Materials, Inc.
- Xuebin LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE, METHOD OF MAKING A SEMICONDUCTOR DEVICE, AND...
- Publication number 20200258997
- Publication date Aug 13, 2020
- Applied Materials, Inc.
- Gaurav THAREJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE HAVING REDUCED CONTACT...
- Publication number 20200203490
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- Gaurav THAREJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...
- Publication number 20190382917
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Christopher S. OLSEN
- C30 - CRYSTAL GROWTH
Information Patent Application
SELF-ALIGNED NANODOTS FOR 3D NAND FLASH MEMORY
- Publication number 20180233359
- Publication date Aug 16, 2018
- Applied Materials, Inc.
- Sungwon JUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...
- Publication number 20180016705
- Publication date Jan 18, 2018
- Applied Materials, Inc.
- Christopher S. OLSEN
- C30 - CRYSTAL GROWTH
Information Patent Application
CARBON ADDITION FOR LOW RESISTIVITY IN SITU DOPED SILICON EPITAXY
- Publication number 20150221730
- Publication date Aug 6, 2015
- Applied Materials, Inc.
- Zhiyuan Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...
- Publication number 20150040822
- Publication date Feb 12, 2015
- Applied Materials, Inc.
- Christopher S. OLSEN
- C30 - CRYSTAL GROWTH
Information Patent Application
EPITAXY OF HIGH TENSILE SILICON ALLOY FOR TENSILE STRAIN APPLICATIONS
- Publication number 20140106547
- Publication date Apr 17, 2014
- Applied Materials, Inc.
- Zhiyuan Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPITAXY OF HIGH TENSILE SILICON ALLOY FOR TENSILE STRAIN APPLICATIONS
- Publication number 20120202338
- Publication date Aug 9, 2012
- Applied Materials, Inc.
- Zhiyuan Ye
- H01 - BASIC ELECTRIC ELEMENTS

Saurabh Chopra

Person

Patents Grantslast 30 patents

Anisotropic sige:b epitaxial film growth for gate all around transi...

Cluster tools, systems, and methods having one or more pressure sta...

Selective methods for fabricating devices and structures

Method of fabricating a semiconductor device having reduced contact...

Semiconductor device, method of making a semiconductor device, and...

Method and apparatus for precleaning a substrate surface prior to e...

Self-aligned nanodots for 3D NAND flash memory

Method and apparatus for precleaning a substrate surface prior to e...

Method and apparatus for precleaning a substrate surface prior to e...

Epitaxy of high tensile silicon alloy for tensile strain applications

Carbon addition for low resistivity in situ doped silicon epitaxy

Epitaxy of high tensile silicon alloy for tensile strain applications

Methods of selectively depositing an epitaxial layer

Phosphorus containing Si epitaxial layers in N-type source/drain ju...

Selective formation of silicon carbon epitaxial layer

Method of forming conformal silicon layer for recessed source-drain

Patents Applicationslast 30 patents

MOVABLE CENTRAL REFLECTORS OF SEMICONDUCTOR PROCESSING EQUIPMENT, A...

REDUCED STRAIN HETEROEPITAXY ASSEMBLY FOR THREE-DIMENSIONAL DEVICE...

METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...

APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS

APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS

APPARATUS AND METHODS FOR HEATING TUNABILITY IN PROCESSING CHAMBERS

HEAT SOURCE ARRANGEMENTS, PROCESSING CHAMBERS, AND RELATED METHODS...

HEAT SOURCE ARRANGEMENTS, PROCESSING CHAMBERS, AND RELATED METHODS...

UNIFORM EPITAXIAL GROWTH OVER CRYSTALLINE TEMPLATE

FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...

BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...

CLUSTER TOOLS, SYSTEMS, AND METHODS HAVING ONE OR MORE PRESSURE STA...

TEMPLATE FOR NANOSHEET SOURCE DRAIN FORMATION WITH BOTTOM DIELECTRIC

ANISOTROPIC SIGE:B EPITAXIAL FILM GROWTH FOR GATE ALL AROUND TRANSI...

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

ANISOTROPIC EPITAXIAL GROWTH

SELECTIVE METHODS FOR FABRICATING DEVICES AND STRUCTURES

TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...

METHOD OF FABRICATING A SEMICONDUCTOR DEVICE HAVING REDUCED CONTACT...

METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...

METHODS FOR LOW TEMPERATURE SILICIDE FORMATION

SEMICONDUCTOR DEVICE, METHOD OF MAKING A SEMICONDUCTOR DEVICE, AND...

METHOD OF FABRICATING A SEMICONDUCTOR DEVICE HAVING REDUCED CONTACT...

METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...

SELF-ALIGNED NANODOTS FOR 3D NAND FLASH MEMORY

METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...

CARBON ADDITION FOR LOW RESISTIVITY IN SITU DOPED SILICON EPITAXY

METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...

EPITAXY OF HIGH TENSILE SILICON ALLOY FOR TENSILE STRAIN APPLICATIONS

EPITAXY OF HIGH TENSILE SILICON ALLOY FOR TENSILE STRAIN APPLICATIONS