Savitha Nanjangud

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for detecting design and process defects on a waf...
- Patent number 9,710,903
- Issue date Jul 18, 2017
- KLA-Tencor Corp.
- Christophe Fouquet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical monitoring in a two-step chemical mechanical polishing process
- Patent number 6,632,124
- Issue date Oct 14, 2003
- Applied Materials Inc.
- Bret W. Adams
- B24 - GRINDING POLISHING
Information Patent Grant
Optical monitoring in a two-step chemical mechanical polishing process
- Patent number 6,506,097
- Issue date Jan 14, 2003
- Applied Materials, Inc.
- Bret W. Adams
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR DETECTING DESIGN AND PROCESS DEFECTS ON A W...
- Publication number 20110276935
- Publication date Nov 10, 2011
- KLA-Tencor Corporation
- Christophe Fouquet
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL MONITORING IN A TWO-STEP CHEMICAL MECHANICAL POLISHING PROCESS
- Publication number 20030104760
- Publication date Jun 5, 2003
- Applied Materials, Inc. a Delaware Corporation
- Bret W. Adams
- B24 - GRINDING POLISHING
Information Patent Application
OPTICAL MONITORING IN A TWO-STEP CHEMICAL MECHANICAL POLISHING PROCESS
- Publication number 20030003845
- Publication date Jan 2, 2003
- Bret W. Adams
- B24 - GRINDING POLISHING