Membership
Tour
Register
Log in
Sayaka Tanimoto
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam apparatus
Patent number
10,037,866
Issue date
Jul 31, 2018
Hitachi High-Technologies Corporation
Momoyo Enyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
9,287,082
Issue date
Mar 15, 2016
Hitachi High-Technologies Corporation
Kenichi Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
8,193,493
Issue date
Jun 5, 2012
Hitachi High-Technologies Corporation
Sayaka Tanimoto
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam apparatus and control method therefor
Patent number
8,026,482
Issue date
Sep 27, 2011
Hitachi High-Technologies Corporation
Muneyuki Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
7,906,761
Issue date
Mar 15, 2011
Hitachi High-Technologies Corporation
Sayaka Tanimoto
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam apparatus
Patent number
7,880,143
Issue date
Feb 1, 2011
Hitachi High-Technologies Corporation
Sayaka Tanimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam application system
Patent number
7,408,760
Issue date
Aug 5, 2008
Hitachi High-Technologies Corporation
Sayaka Tanimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for applying charged particle beam
Patent number
7,378,668
Issue date
May 27, 2008
Hitachi High-Technologies Corporation
Sayaka Tanimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for electron-beam lithography
Patent number
7,276,709
Issue date
Oct 2, 2007
Hitachi High-Technologies Corporation
Yoshimasa Fukushima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of charged particle beam lithography and equipment for charg...
Patent number
7,105,842
Issue date
Sep 12, 2006
Hitachi High-Technologies Corporation
Sayaka Tanimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam writing equipment and electron beam writing method
Patent number
7,098,464
Issue date
Aug 29, 2006
Hitachi High-Technologies Corporation
Yasunari Sohda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-charged beam lens and charged beam exposure apparatus using t...
Patent number
7,060,984
Issue date
Jun 13, 2006
Canon Kabushiki Kaisha
Kenichi Nagae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multibeam generating apparatus and electron beam drawing apparatus
Patent number
6,870,310
Issue date
Mar 22, 2005
Canon Kabushiki Kaisha
Masahiko Okunuki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20170025251
Publication date
Jan 26, 2017
Hitachi High-Technologies Corporation
Momoyo ENYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20150228443
Publication date
Aug 13, 2015
Hitachi High-Technologies Corporation
Kenichi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM APPARATUS AND LENS ARRAY
Publication number
20130248731
Publication date
Sep 26, 2013
Hitachi High-Technologies Corporation
Sayaka TANIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20110139985
Publication date
Jun 16, 2011
Hitachi High-Technologies Corporation
Sayaka TANIMOTO
G01 - MEASURING TESTING
Information
Patent Application
ELECTRON BEAM APPARATUS
Publication number
20100133433
Publication date
Jun 3, 2010
Sayaka TANIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREFOR
Publication number
20090140143
Publication date
Jun 4, 2009
Muneyuki FUKUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20080230697
Publication date
Sep 25, 2008
Sayaka TANIMOTO
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for applying charged particle beam
Publication number
20060289781
Publication date
Dec 28, 2006
Sayaka Tanimoto
B82 - NANO-TECHNOLOGY
Information
Patent Application
Charged particle beam application system
Publication number
20060056131
Publication date
Mar 16, 2006
Sayaka Tanimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and method for electron-beam lithography
Publication number
20050230637
Publication date
Oct 20, 2005
Yoshimasa Fukushima
B82 - NANO-TECHNOLOGY
Information
Patent Application
Multi-charged beam lens and charged beam exposure apparatus using t...
Publication number
20050077475
Publication date
Apr 14, 2005
Canon Kabushiki Kaisha
Kenichi Nagae
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron beam writing equipment and electron beam writing method
Publication number
20050072939
Publication date
Apr 7, 2005
Hitachi High-Technologies, Ltd.
Yasunari Sohda
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method of charged particle beam lithography and equipment for charg...
Publication number
20050072941
Publication date
Apr 7, 2005
Hitachi High-Technologies, Ltd.
Sayaka Tanimoto
B82 - NANO-TECHNOLOGY
Information
Patent Application
Multibeam generating apparatus and electron beam drawing apparatus
Publication number
20040056578
Publication date
Mar 25, 2004
Canon Kabushiki Kaisha
Masahiko Okunuki
B82 - NANO-TECHNOLOGY