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Sayumi Hirose
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Kanagawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Ion implanter and particle detection method
Patent number
11,699,569
Issue date
Jul 11, 2023
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Aki Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ION IMPLANTER, ION IMPLANTATION METHOD, AND SEMICONDUCTOR DEVICE MA...
Publication number
20220130636
Publication date
Apr 28, 2022
Sumitomo Heavy Industries, Ltd.
Sayumi Hirose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTER AND PARTICLE DETECTION METHOD
Publication number
20220102112
Publication date
Mar 31, 2022
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Aki Ninomiya
H01 - BASIC ELECTRIC ELEMENTS