Scott A. HENDRICKSON

Person

Brentwood, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for UV treatment, chemical treatment, and depo...
- Patent number 10,570,517
- Issue date Feb 25, 2020
- Applied Materials, Inc.
- Amit Bansal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and hardware for cleaning UV chambers
- Patent number 9,506,145
- Issue date Nov 29, 2016
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and hardware for cleaning UV chambers
- Patent number 9,364,871
- Issue date Jun 14, 2016
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave excursion detection for semiconductor processing
- Patent number 8,841,629
- Issue date Sep 23, 2014
- Applied Materials, Inc.
- Scott A. Hendrickson
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Enhancement in UV curing efficiency using oxygen-doped purge for ul...
- Patent number 8,753,449
- Issue date Jun 17, 2014
- Applied Materials, Inc.
- Mahendra Chhabra
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for UV based silylation chamber clean
- Patent number 8,657,961
- Issue date Feb 25, 2014
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon dioxide layer deposited with BDEAS
- Patent number 8,343,881
- Issue date Jan 1, 2013
- Applied Materials, Inc.
- Yong-Won Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual-bulb lamphead control methodology
- Patent number 8,309,421
- Issue date Nov 13, 2012
- Applied Materials, Inc.
- Yao-Hung Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for exposing a substrate to a rotating irradia...
- Patent number 8,203,126
- Issue date Jun 19, 2012
- Applied Materials, Inc.
- Juan Carlos Rocha-Alvarez
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus and method for exposing a substrate to a rotating irradia...
- Patent number 7,777,198
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Juan Carlos Rocha-Alvarez
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus and method for exposing a substrate to UV radiation using...
- Patent number 7,692,171
- Issue date Apr 6, 2010
- Andrzei Kaszuba
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
High efficiency UV curing system
- Patent number 7,663,121
- Issue date Feb 16, 2010
- Applied Materials, Inc.
- Thomas Nowak
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus and method for treating a substrate with UV radiation usi...
- Patent number 7,566,891
- Issue date Jul 28, 2009
- Applied Materials, Inc.
- Juan Carlos Rocha-Alvarez
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Accelerated plasma clean
- Patent number 7,506,654
- Issue date Mar 24, 2009
- Applied Materials, Inc.
- Shankar N. Chandran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Accelerated plasma clean
- Patent number 6,814,087
- Issue date Nov 9, 2004
- Applied Materials, Inc.
- Shankar W. Chandran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for distributing gases in a chemical vapor deposition system
- Patent number 6,495,233
- Issue date Dec 17, 2002
- Applied Materials, Inc.
- Inna Shmurun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporization of precursors at point of use
- Patent number 6,443,435
- Issue date Sep 3, 2002
- Applied Materials, Inc.
- Scott Hendrickson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Accelerated plasma clean
- Patent number 6,374,831
- Issue date Apr 23, 2002
- Applied Materials, Inc.
- Shankar N. Chandran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for generating controlled mixture of organic v...
- Patent number 6,311,959
- Issue date Nov 6, 2001
- Applied Materials, Inc.
- Son T. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for processing semiconductive wafers
- Patent number 6,300,255
- Issue date Oct 9, 2001
- Applied Materials, Inc.
- Shankar Venkataranan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND HARDWARE FOR CLEANING UV CHAMBERS
- Publication number 20160296981
- Publication date Oct 13, 2016
- Applied Materials, Inc.
- Sanjeev BALUJA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR UV TREATMENT, CHEMICAL TREATMENT, AND DEPO...
- Publication number 20160289838
- Publication date Oct 6, 2016
- Applied Materials, Inc.
- Amit BANSAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIGHT IRRADIANCE AND THERMAL MEASUREMENT IN UV AND CVD CHAMBERS
- Publication number 20140264059
- Publication date Sep 18, 2014
- Sanjeev BALUJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND HARDWARE FOR CLEANING UV CHAMBERS
- Publication number 20140053866
- Publication date Feb 27, 2014
- Applied Materials, Inc.
- Sanjeev BALUJA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE EXCURSION DETECTION FOR SEMICONDUCTOR PROCESSING
- Publication number 20140000515
- Publication date Jan 2, 2014
- Applied Materials, Inc.
- SCOTT A. HENDRICKSON
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ENHANCEMENT IN UV CURING EFFICIENCY USING OXYGEN-DOPED PURGE FOR UL...
- Publication number 20130344704
- Publication date Dec 26, 2013
- Applied Materials, Inc.
- Mahendra CHHABRA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR UV BASED SILYLATION CHAMBER CLEAN
- Publication number 20130284204
- Publication date Oct 31, 2013
- BO XIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL-BULB LAMPHEAD CONTROL METHODOLOGY
- Publication number 20130122611
- Publication date May 16, 2013
- APPLIED MATERIALS, INC.
- YAO-HUNG YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR UV TREATMENT, CHEMICAL TREATMENT, AND DEPO...
- Publication number 20120258259
- Publication date Oct 11, 2012
- Amit Bansal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL-BULB LAMPHEAD CONTROL METHODOLOGY
- Publication number 20120129275
- Publication date May 24, 2012
- Applied Materials, Inc.
- Yao-Hung Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DUAL DELIVERY CHAMBER DESIGN
- Publication number 20120097330
- Publication date Apr 26, 2012
- Applied Materials, Inc.
- Prahallad Iyengar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON DIOXIDE LAYER DEPOSITED WITH BDEAS
- Publication number 20110298099
- Publication date Dec 8, 2011
- Applied Materials, Inc.
- Yong-Won LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO A ROTATING IRRADIA...
- Publication number 20100285240
- Publication date Nov 11, 2010
- Applied Materials, Inc.
- Juan Carlos Rocha-Alvarez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR UV CURING WITH WATER VAPOR
- Publication number 20090305515
- Publication date Dec 10, 2009
- Dustin Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH EFFICIENCY UV CURING SYSTEM
- Publication number 20090162259
- Publication date Jun 25, 2009
- Thomas Nowak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO UV RADIATION USING...
- Publication number 20080067425
- Publication date Mar 20, 2008
- Applied Materials, Inc.
- Andrzei Kaszuba
- B82 - NANO-TECHNOLOGY
Information Patent Application
NITROGEN ENRICHED COOLING AIR MODULE FOR UV CURING SYSTEM
- Publication number 20070295012
- Publication date Dec 27, 2007
- Applied Materials, Inc.
- Dustin W. Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OZONE ABATEMENT IN A RE-CIRCULATING COOLING SYSTEM
- Publication number 20070298167
- Publication date Dec 27, 2007
- Applied Materials, Inc.
- DUSTIN W. HO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO A ROTATING IRRADIA...
- Publication number 20070286963
- Publication date Dec 13, 2007
- Applied Materials, Inc.
- Juan Carlos Rocha-Alvarez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TREATING A SUBSTRATE WITH UV RADIATION USI...
- Publication number 20070257205
- Publication date Nov 8, 2007
- Applied Materials, Inc.
- Juan Carlos Rocha-Alvarez
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
HIGH EFFICIENCY UV CURING SYSTEM
- Publication number 20060249078
- Publication date Nov 9, 2006
- Thomas Nowak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High efficiency UV curing system
- Publication number 20060249175
- Publication date Nov 9, 2006
- APPLIED MATERIALS, INC.
- Thomas Nowak
- B08 - CLEANING
Information Patent Application
TANDEM UV CHAMBER FOR CURING DIELECTRIC MATERIALS
- Publication number 20060251827
- Publication date Nov 9, 2006
- APPLIED MATERIALS, INC.
- Thomas Nowak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Accelerated plasma clean
- Publication number 20050103266
- Publication date May 19, 2005
- Applied Materials, Inc.
- Shankar N. Chandran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Accelerated plasma clean
- Publication number 20020104467
- Publication date Aug 8, 2002
- Applied Materials, Inc.
- Shankar N. Chandran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Scott A. HENDRICKSON

Person

Patents Grantslast 30 patents

Apparatus and method for UV treatment, chemical treatment, and depo...

Method and hardware for cleaning UV chambers

Method and hardware for cleaning UV chambers

Microwave excursion detection for semiconductor processing

Enhancement in UV curing efficiency using oxygen-doped purge for ul...

Method for UV based silylation chamber clean

Silicon dioxide layer deposited with BDEAS

Dual-bulb lamphead control methodology

Apparatus and method for exposing a substrate to a rotating irradia...

Apparatus and method for exposing a substrate to a rotating irradia...

Apparatus and method for exposing a substrate to UV radiation using...

High efficiency UV curing system

Apparatus and method for treating a substrate with UV radiation usi...

Accelerated plasma clean

Accelerated plasma clean

Apparatus for distributing gases in a chemical vapor deposition system

Vaporization of precursors at point of use

Accelerated plasma clean

Method and apparatus for generating controlled mixture of organic v...

Method and apparatus for processing semiconductive wafers

Patents Applicationslast 30 patents

METHOD AND HARDWARE FOR CLEANING UV CHAMBERS

APPARATUS AND METHOD FOR UV TREATMENT, CHEMICAL TREATMENT, AND DEPO...

LIGHT IRRADIANCE AND THERMAL MEASUREMENT IN UV AND CVD CHAMBERS

METHOD AND HARDWARE FOR CLEANING UV CHAMBERS

MICROWAVE EXCURSION DETECTION FOR SEMICONDUCTOR PROCESSING

ENHANCEMENT IN UV CURING EFFICIENCY USING OXYGEN-DOPED PURGE FOR UL...

METHOD FOR UV BASED SILYLATION CHAMBER CLEAN

DUAL-BULB LAMPHEAD CONTROL METHODOLOGY

APPARATUS AND METHOD FOR UV TREATMENT, CHEMICAL TREATMENT, AND DEPO...

DUAL-BULB LAMPHEAD CONTROL METHODOLOGY

DUAL DELIVERY CHAMBER DESIGN

SILICON DIOXIDE LAYER DEPOSITED WITH BDEAS

APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO A ROTATING IRRADIA...

METHOD AND APPARATUS FOR UV CURING WITH WATER VAPOR

HIGH EFFICIENCY UV CURING SYSTEM

APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO UV RADIATION USING...

NITROGEN ENRICHED COOLING AIR MODULE FOR UV CURING SYSTEM

OZONE ABATEMENT IN A RE-CIRCULATING COOLING SYSTEM

APPARATUS AND METHOD FOR EXPOSING A SUBSTRATE TO A ROTATING IRRADIA...

APPARATUS AND METHOD FOR TREATING A SUBSTRATE WITH UV RADIATION USI...

HIGH EFFICIENCY UV CURING SYSTEM

High efficiency UV curing system

TANDEM UV CHAMBER FOR CURING DIELECTRIC MATERIALS

Accelerated plasma clean

Accelerated plasma clean