Scott Anderson Middlebrooks

Follow

Person

Galveston, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optimization method and a lithographic cell
- Patent number 8,612,045
- Issue date Dec 17, 2013
- ASML Holding N.V.
- Everhardus Cornelis Mos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Observability in metrology measurements
- Patent number 7,502,715
- Issue date Mar 10, 2009
- ASML Netherlands B.V.
- Scott A. Middlebrooks
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Inspection Apparatus for Lithography
- Publication number 20110141444
- Publication date Jun 16, 2011
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G01 - MEASURING TESTING
Information Patent Application
Optimization Method and a Lithographic Cell
- Publication number 20100161099
- Publication date Jun 24, 2010
- ASML NETHERLANDS B.V.
- Everhardus Cornelis Mos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Control of overlay registration
- Publication number 20050083243
- Publication date Apr 21, 2005
- Model Predictive Systems, Inc.
- Scott A. Middlebrooks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optimal model predictive control of overlay implemented in a ASIC fab
- Publication number 20040167655
- Publication date Aug 26, 2004
- Scott Middlebrooks
- G05 - CONTROLLING REGULATING