Scott Benedict

Person

Nashua, NH, US

People

Patents Grantslast 30 patents

Information Patent Grant
Predictive diagnostics systems and methods using vacuum pressure co...
- Patent number 11,480,457
- Issue date Oct 25, 2022
- MKS Instruments, Inc.
- David Brian Chamberlain
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method and apparatus for deposition cleaning in a pumping line
- Patent number 11,367,598
- Issue date Jun 21, 2022
- MKS Instruments, Inc.
- Gordon Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for deposition cleaning in a pumping line
- Patent number 11,024,489
- Issue date Jun 1, 2021
- MKS Instruments, Inc.
- Gordon Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Predictive diagnostics systems and methods using vacuum pressure co...
- Patent number 10,557,736
- Issue date Feb 11, 2020
- MKS Instruments, Inc.
- David Brian Chamberlain
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for deposition cleaning in a pumping line
- Patent number 10,535,506
- Issue date Jan 14, 2020
- MKS Instruments, Inc.
- Gordon Hill
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Method and apparatus for multiple-channel pulse gas delivery system
- Patent number 9,348,339
- Issue date May 24, 2016
- MKS Instruments, Inc.
- Junhua Ding
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and Apparatus for Deposition Cleaning in a Pumping Line
- Publication number 20210082672
- Publication date Mar 18, 2021
- MKS Instruments, Inc.
- Gordon Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREDICTIVE DIAGNOSTICS SYSTEMS AND METHODS USING VACUUM PRESSURE CO...
- Publication number 20200124457
- Publication date Apr 23, 2020
- MKS Instruments, Inc.
- David Brian Chamberlain
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Method and Apparatus for Deposition Cleaning in a Pumping Line
- Publication number 20200075298
- Publication date Mar 5, 2020
- MKS Instruments, Inc.
- Gordon Hill
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
PREDICTIVE DIAGNOSTICS SYSTEMS AND METHODS USING VACUUM PRESSURE CO...
- Publication number 20170328756
- Publication date Nov 16, 2017
- MKS Instruments, Inc.
- David Brian Chamberlain
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Deposition Cleaning in a Pumping Line
- Publication number 20170200591
- Publication date Jul 13, 2017
- MKS Instruments, Inc.
- Gordon Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MULTIPLE-CHANNEL PULSE GAS DELIVERY SYSTEM
- Publication number 20120076935
- Publication date Mar 29, 2012
- Junhua Ding
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Scott Benedict

Person

Patents Grantslast 30 patents

Predictive diagnostics systems and methods using vacuum pressure co...

Method and apparatus for deposition cleaning in a pumping line

Method and apparatus for deposition cleaning in a pumping line

Predictive diagnostics systems and methods using vacuum pressure co...

Method and apparatus for deposition cleaning in a pumping line

Method and apparatus for multiple-channel pulse gas delivery system

Patents Applicationslast 30 patents

Method and Apparatus for Deposition Cleaning in a Pumping Line

PREDICTIVE DIAGNOSTICS SYSTEMS AND METHODS USING VACUUM PRESSURE CO...

Method and Apparatus for Deposition Cleaning in a Pumping Line

PREDICTIVE DIAGNOSTICS SYSTEMS AND METHODS USING VACUUM PRESSURE CO...

Method and Apparatus for Deposition Cleaning in a Pumping Line

METHOD AND APPARATUS FOR MULTIPLE-CHANNEL PULSE GAS DELIVERY SYSTEM