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Scott Briggs
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Menlo Park, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Systems and methods for cleaning an edge ring pocket
Patent number
11,935,730
Issue date
Mar 19, 2024
Lam Research Corporation
Eric Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching features in dielectric layers
Patent number
9,673,058
Issue date
Jun 6, 2017
Lam Research Corporation
Scott Briggs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Negative bias critical dimension trim
Patent number
7,544,521
Issue date
Jun 9, 2009
Lam Research Corporation
Scott Briggs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching a metal hard mask for an integrated circuit structure
Patent number
6,930,048
Issue date
Aug 16, 2005
Lam Research Corporation
SiYi Li
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ETCHING AND PLASMA UNIFORMITY CONTROL USING MAGNETICS
Publication number
20230071249
Publication date
Mar 9, 2023
LAM RESEARCH CORPORATION
Scott Briggs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR CLEANING AN EDGE RING POCKET
Publication number
20220254616
Publication date
Aug 11, 2022
LAM RESEARCH CORPORATION
Eric Hudson
H01 - BASIC ELECTRIC ELEMENTS