Scott C. Holden

Person

Melrose, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature controlled ion source
- Patent number 10,262,833
- Issue date Apr 16, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled ion source
- Patent number 9,859,098
- Issue date Jan 2, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for rotational transfer of articles between vacuu...
- Patent number 9,673,076
- Issue date Jun 6, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Sheri A. Roub
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Force sensing system for substrate lifting apparatus
- Patent number 9,108,322
- Issue date Aug 18, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Richard V. Chisholm
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Techniques for changing temperature of a platen
- Patent number 8,149,256
- Issue date Apr 3, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for temperature controlled ion implantation
- Patent number 7,993,698
- Issue date Aug 9, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Julian Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for temperature-controlled ion implantation
- Patent number 7,655,933
- Issue date Feb 2, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald England
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of heating a substrate with multiple selectively deactuated...
- Patent number 6,046,435
- Issue date Apr 4, 2000
- Brooks Automation, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heating apparatus with glass-ceramic panels and thin film...
- Patent number 5,911,896
- Issue date Jun 15, 1999
- Brooks Automation, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Temperature Controlled Ion Source
- Publication number 20180090297
- Publication date Mar 29, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Controlled Ion Source
- Publication number 20170178857
- Publication date Jun 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ROTATIONAL TRANSFER OF ARTICLES BETWEEN VACUU...
- Publication number 20150125239
- Publication date May 7, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Sheri A. Roub
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORCE SENSING SYSTEM FOR SUBSTRATE LIFTING APPARATUS
- Publication number 20140324221
- Publication date Oct 30, 2014
- Richard V. Chisholm
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TECHNIQUES FOR CHANGING TEMPERATURE OF A PLATEN
- Publication number 20090303306
- Publication date Dec 10, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for Handling a Substrate and a Method Thereof
- Publication number 20090196717
- Publication date Aug 6, 2009
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Techniques for temperature controlled ion implantation
- Publication number 20080076194
- Publication date Mar 27, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Julian Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR TEMPERATURE-CONTROLLED ION IMPLANTATION
- Publication number 20080042078
- Publication date Feb 21, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald ENGLAND
- H01 - BASIC ELECTRIC ELEMENTS

Scott C. Holden

Person

Patents Grantslast 30 patents

Temperature controlled ion source

Temperature controlled ion source

System and method for rotational transfer of articles between vacuu...

Force sensing system for substrate lifting apparatus

Techniques for changing temperature of a platen

Techniques for temperature controlled ion implantation

Techniques for temperature-controlled ion implantation

Method of heating a substrate with multiple selectively deactuated...

Substrate heating apparatus with glass-ceramic panels and thin film...

Patents Applicationslast 30 patents

Temperature Controlled Ion Source

Temperature Controlled Ion Source

SYSTEM AND METHOD FOR ROTATIONAL TRANSFER OF ARTICLES BETWEEN VACUU...

FORCE SENSING SYSTEM FOR SUBSTRATE LIFTING APPARATUS

TECHNIQUES FOR CHANGING TEMPERATURE OF A PLATEN

Apparatus for Handling a Substrate and a Method Thereof

Techniques for temperature controlled ion implantation

TECHNIQUES FOR TEMPERATURE-CONTROLLED ION IMPLANTATION